China Ceramic Manufacturers, Suppliers, Factory

Semicorex is your partner for improving in semiconductor processing. Our silicon carbide coatings are dense, high temperature and chemical resistant, which are often used in the whole cycle of semiconductor manufacturing, including semiconductor wafer & wafer processing and semiconductor fabrication.

High-purity SiC ceramic components are crucial to processes in the semiconductor. Our offering ranges from consumables parts for wafer processing equipment, such as Silicon Carbide wafer boat, cantilever paddles, tubes, etc for Epitaxy or MOCVD.

Advantages for semiconductor processes

The thin film deposition phases such as epitaxy or MOCVD, or wafer handling processing such as etching or ion implant must endure high temperatures and harsh chemical cleaning. Semicorex supplies high-purity silicon carbide (SiC) construction provides superior heat resistance and durable chemical resistance, even thermal uniformity for consistent epi layer thickness and resistance.

Chamber Lids →
Chamber Lids used in crystal growth and wafer handling processing must endure high temperatures and harsh chemical cleaning.

Cantilever Paddle →
Cantilever Paddle is a crucial component used in semiconductor manufacturing processes, particularly in diffusion or LPCVD furnaces during processes like diffusion and RTP.

Process Tube →
Process Tube is a crucial component, specifically designed in various semiconductor processing applications such as RTP, diffusion.

Wafer Boats →
Wafer Boat is used in semiconductor processing, it has been meticulously designed to ensure the delicate wafers are kept safe during the critical stages of production.

Inlet Rings →
SiC coated gas inlet ring by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stability in extreme environment.

Focus Ring →
Semicorex supplies Silicon Carbide Coated focus ring is really stable for RTA, RTP or harsh chemical cleaning.

Wafer Chuck →
Semicorex ultra-flat ceramic vacuum wafer chucks is high purity SiC coated using in the wafer handling process.

Semicorex also have ceramic products in Alumina (Al2O3), Silicon Nitride (Si3N4), Aluminum Nitride (AIN), Zirconia (ZrO2), Composite Ceramic, etc.

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SiC ICP plate

Semicorex SiC ICP plate is an advanced semiconductor component specifically engineered to meet the rigorous demands of modern semiconductor manufacturing processes. This high-performance product is designed with the latest silicon carbide (SiC) material technology, offering unparalleled durability, efficiency, and reliability, making it an essential component in the fabrication of cutting-edge semiconductor devices. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China*.

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SiC ICP Etching Plate

Semicorex SiC ICP Etching Plate is an advanced and indispensable component in the semiconductor industry, designed to enhance the precision and efficiency of etching processes. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China*.

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Alumina End Effector

Semicorex Alumina End Effector has emerged as an indispensable tool in the demanding realm of semiconductor manufacturing, where even microscopic imperfections can compromise device performance, the role of precision wafer handling cannot be overstated. The Alumina End Effector provides a unique combination of precision, purity, and durability essential for manipulating delicate silicon wafers throughout various fabrication processes.**

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Custom SiC Cantilever Paddle

Semicorex Custom SiC Cantilever Paddle has become an indispensable component in the photovoltaic industry, playing a critical role in the efficient and precise handling of silicon wafers during high-temperature diffusion processes. The Custom SiC Cantilever Paddle, meticulously engineered from high-performance silicon carbide (SiC) ceramics, offers a unique blend of properties essential for maintaining wafer integrity, ensuring process uniformity, and maximizing productivity in demanding diffusion furnace environments.**

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SiC Bearing

Semicorex SiC Bearing with its exceptional hardness, strength, and chemical inertness, has emerged as a cornerstone material for engineering demanding applications across diverse industries. When crafted into bearings, SiC unlocks a new level of performance and reliability, particularly in environments characterized by extreme temperatures, corrosive substances, and stringent purity requirements. We at Semicorex are dedicated to manufacturing and supplying high-performance SiC Bearing that fuses quality with cost-efficiency.**

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Silicon Carbide Seal Ring

Semicorex Silicon Carbide Seal Ring has emerged as a critical enabling technology within the semiconductor industry, offering unparalleled performance and reliability in the face of increasingly demanding process conditions. Their unique combination of material properties makes it ideal for a wide range of applications, ensuring optimal equipment uptime, extended component lifecycles, and ultimately, lower total cost of ownership. We at Semicorex are dedicated to manufacturing and supplying high-performance Silicon Carbide Seal Ring that fuses quality with cost-efficiency.**

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Semicorex has been producing Ceramic for many years and is one of the professional Ceramic manufacturers and Suppliers in China. Once you buy our advanced and durable products which supply bulk packing, we guarantee the large quantity in quick delivery. Over the years, we have provided customers with customized service. Customers are satisfied with our products and excellent service. We sincerely look forward to becoming your reliable long-term business partner! Welcome to buy products from our factory.