Semicorex is your partner for improving in semiconductor processing. Our silicon carbide coatings are dense, high temperature and chemical resistant, which are often used in the whole cycle of semiconductor manufacturing, including semiconductor wafer & wafer processing and semiconductor fabrication.
High-purity SiC ceramic components are crucial to processes in the semiconductor. Our offering ranges from consumables parts for wafer processing equipment, such as Silicon Carbide wafer boat, cantilever paddles, tubes, etc for Epitaxy or MOCVD.
Advantages for semiconductor processes
The thin film deposition phases such as epitaxy or MOCVD, or wafer handling processing such as etching or ion implant must endure high temperatures and harsh chemical cleaning. Semicorex supplies high-purity silicon carbide (SiC) construction provides superior heat resistance and durable chemical resistance, even thermal uniformity for consistent epi layer thickness and resistance.
Chamber Lids →
Chamber Lids used in crystal growth and wafer handling processing must endure high temperatures and harsh chemical cleaning.
Cantilever Paddle →
Cantilever Paddle is a crucial component used in semiconductor manufacturing processes, particularly in diffusion or LPCVD furnaces during processes like diffusion and RTP.
Process Tube →
Process Tube is a crucial component, specifically designed in various semiconductor processing applications such as RTP, diffusion.
Wafer Boats →
Wafer Boat is used in semiconductor processing, it has been meticulously designed to ensure the delicate wafers are kept safe during the critical stages of production.
Inlet Rings →
SiC coated gas inlet ring by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stability in extreme environment.
Focus Ring →
Semicorex supplies Silicon Carbide Coated focus ring is really stable for RTA, RTP or harsh chemical cleaning.
Wafer Chuck →
Semicorex ultra-flat ceramic vacuum wafer chucks is high purity SiC coated using in the wafer handling process.
Semicorex also have ceramic products in Alumina (Al2O3), Silicon Nitride (Si3N4), Aluminum Nitride (AIN), Zirconia (ZrO2), Composite Ceramic, etc.
Semicorex PBN Crucibles are ultra-high purity, chemically inert containers ideal for high-temperature and vacuum applications. Choose Semicorex for unmatched material quality, precision engineering, and expert support trusted by industry leaders worldwide.*
Read MoreSend InquirySemicorex Carbon Ceramic Brakes are the ultimate braking solution for high-performance applications. Choose Semicorex for unmatched material expertise, precision manufacturing, and proven reliability trusted by leading OEMs worldwide.*
Read MoreSend InquirySemicorex Aluminum Nitride Heaters are high-performance ceramic heating elements known for their exceptional thermal conductivity, rapid response, and electrical insulation. Choosing Semicorex means partnering with a trusted expert in advanced ceramic technologies—delivering precision-engineered solutions, consistent quality, and responsive technical support tailored to your application needs.*
Read MoreSend InquirySemicorex 4-Inch SiC Boats are high-performance wafer carriers designed for superior thermal and chemical stability in semiconductor manufacturing. Trusted by industry leaders, Semicorex combines advanced materials expertise with precision engineering to deliver products that enhance yield, reliability, and operational efficiency.*
Read MoreSend InquirySemicorex AlN heaters are advanced ceramic-based heating elements designed for high-performance thermal applications. These heaters offer exceptional thermal conductivity, electrical insulation, and resistance to chemical and mechanical stress, making them ideal for demanding industrial and scientific applications. AlN heaters provide precise and uniform heating, ensuring efficient thermal management in environments requiring high reliability and durability.*
Read MoreSend InquirySemicorex Silicon Carbide Boats are high-performance wafer carriers designed for semiconductor oxidation and diffusion processes. These precision-engineered components provide a stable, high-purity environment for silicon wafers inside furnace tubes, ensuring optimal process reliability and efficiency. *
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