PSS (Patterned Sapphire Substrate) etching carrier is used in the fabrication of LED devices. The PSS etching carrier serves as a substrate for the growth of a thin film of gallium nitride (GaN) that forms the LED structure, then experience the etching process. So it demands the material with high heat and corrosion resistance. Semicorex SiC coated PSS etching carrier engineered specifically for these demanding epitaxy equipment applications. The carrier is silicon carbide coated using by CVD method, also has a high thermal conductivity, and excellent heat distribution properties.