Home > Products > Ceramic > Silicon Carbide (SiC) > Wafer Vacuum Chuck
Wafer Vacuum Chuck

Wafer Vacuum Chuck

Perfect for next-generation lithography and wafer-handling applications, Semicorex ultra-pure ceramic components ensure minimal contamination and provide exceptionally long life performance. Our Wafer Vacuum Chuck has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

Send Inquiry

Product Description

Semicorex ultra-flat ceramic Wafer Vacuum Chuck is high purity SiC coated using in the wafer handling process. Semiconductor Wafer Vacuum Chuck by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stablity in extreme environment, and improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize the risk of back-side particles for sensitive applications.

At Semicorex, we focus on providing high-quality, cost-effective Wafer Vacuum Chuck, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.

Parameters of Wafer Vacuum Chuck

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of Wafer Vacuum Chuck

● Ultra-flat capabilities

● Mirror polish

● Exceptional light weight

● High stiffness

● Low thermal expansion

● Φ 300 mm diameter and beyond

● Extreme wear resistance

Hot Tags: Wafer Vacuum Chuck, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

Related Category

Send Inquiry

Please feel free to give your inquiry in the form below. We will reply you in 24 hours.
We use cookies to offer you a better browsing experience, analyze site traffic and personalize content. By using this site, you agree to our use of cookies. Privacy Policy
Reject Accept