Silicon carbide ceramic (SiC) is an advanced ceramic material containing silicon and carbon. Grains of silicon carbide can be bonded together by sintering to form very hard ceramics. Semicorex supplies custom silicon carbide ceramics as your requiring.
Applications
With silicon carbide ceramics the material properties remain constant up to temperatures above 1,400°C. The high Young’s modulus > 400 GPa ensures excellent dimensional stability.
A typical application for silicon carbide components is dynamic sealing technology using friction bearings and mechanical seals, for instance in pumps and drive systems.
With the advanced properties, silicon carbide ceramics are also ideal for use in the semiconductor industry.
Wafer Boats →
Semicorex Wafer Boat is made of sintered silicon carbide ceramic, which has good resistance to corrosion and excellent resistance to high temperatures and thermal shock. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and contaminants for high-capacity wafer carriers.
Reaction sintered silicon carbide
Compared with other sintering processes, the size change of reaction sintering during the densification process is small, and products with precise dimensions can be produced. However, the presence of a large amount of SiC in the sintered body makes the high temperature performance of reaction sintered SiC ceramics worse.
Pressureless sintered silicon carbide
Pressureless sintered silicon carbide (SSiC) is a particularly light and at the same time hard high-performance ceramic. SSiC is characterized by high strength, which remains almost constant even at extreme temperatures.
Recrystal silicon carbide
Recrystallized silicon carbide(RSiC) are next generation materials formed by mixing high-purity silicon carbide coarse powder and high-activity silicon carbide fine powder, and after grouting, vacuum sintering at 2450 ° C to recrystallize.
Semicorex Wafer Vacuum Chucks are ultra-precision SiC vacuum chucks designed for stable wafer fixation and nanometer-level positioning in advanced semiconductor lithography processes. Semicorex provides high-performance domestic alternatives to imported vacuum chucks with faster delivery, competitive pricing, and responsive technical support.*
Read MoreSend InquirySemicorex SiC Ceramic Vacuum Chuck is manufactured from high-purity Sintered Dense Silicon Carbide (SSiC), are the definitive solution for high-precision wafer handling and thinning, providing unparalleled stiffness, thermal stability, and sub-micron flatness. Semicorex are keen to provide the high quality and cost efficient products for worldwide customers.*
Read MoreSend InquirySemicorex SiC porous ceramic debonding chucks are the essential components specially designed for adsorption and fixation of thinned ultra-thin wafers in advanced semiconductor manufacturing. Semicorex is committed to offering the precision-machined SiC porous ceramic chucks with market-leading quality for our distinguished customers.
Read MoreSend InquirySemicorex SiC porous ceramic vacuum chucks are the highly specialized ceramic fixtures that utilize the special structure of porous silicon carbide ceramic materials to achieve vacuum adsorption of workpieces. Leveraging state-of-the-art production technologies and mature manufacturing experience, Semicorex is committed to providing our valued customers with market-leading quality SiC porous ceramic vacuum chucks.
Read MoreSend InquirySemicorex SiC ceramic vacuum chucks are precision vacuum adsorption devices manufactured from silicon carbide ceramic, which can semiconductor wafers are precisely and stably positioned in specific positions during processing and inspection. Using Semicorex SiC ceramic vacuum chucks can help improve semiconductor manufacturing yields, enhance semiconductor device performance, and reduce overall manufacturing costs.
Read MoreSend InquirySemicorex RTA SiC wafer carriers are the essential wafer carrying tools, which are specially designed for the rapid thermal annealing process in semiconductor manufacturing. Semicorex RTA SiC wafer carriers are the optimal solutions for rapid thermal annealing process, which can help improve semiconductor manufacturing yields and enhance semiconductor device performance.
Read MoreSend Inquiry