Focus ring or edge rings are designed to improve etch uniformity around the wafer edge or perimeter.
Semicorex focus rings are silicon carbide coated using chemical vapor deposition(CVD)provide superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance, which are built to withstand the extreme environments in plasma etching or dry etching process.
Semicorex SiC Focus Ring is a high-purity silicon carbide ring component designed to optimize plasma distribution and wafer process uniformity in semiconductor manufacturing. Choosing Semicorex means ensuring consistent quality, advanced material engineering, and reliable performance trusted by leading semiconductor fabs worldwide.*
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