Chamber lids are used to create a clean, inert, and protected environment in deposition chambers, so they are exposed to plasma and high temperature during deposition or etch processes. Semicorex chamber lids are durable ceramic components coated by silicon carbide using chemical vapor deposition(CVD) method, great to stand up to these challenging environments.
Semicorex SiC Lid is a high-purity silicon carbide component engineered for extreme semiconductor processing environments. Choosing Semicorex means ensuring unmatched material quality, precision engineering, and custom solutions trusted by leading semiconductor manufacturers worldwide.*
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