China TaC Coating Manufacturers, Suppliers, Factory

TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.

Tantalum carbide (TaC) is a compound that consists of tantalum and carbon. It has metallic electrical conductivity and an exceptionally high melting point, making it a refractory ceramic material known for its strength, hardness, and heat and wear resistance. The melting point of Tantalum Carbides peaks at about 3880°C depending on purity and has one of the highest melting points among the binary compounds. This makes it an attractive alternative when higher temperature demands exceed performance capabilities used in compound semiconductors epitaxial processes such as MOCVD and LPE.

Material data of Semicorex TaC Coating

Projects	Parameters
Density	14.3 (gm/cm³)
Emissivity	0.3
CTE (×10^-6/K)	6.3
Hardness (HK)	2000
Resistance (Ohm-cm)	1×10^-5
Thermal Stability	<2500℃
Graphite Dimension Change	-10~-20um (reference value)
Coating Thickness	≥20um typical value(35um±10um)

The above are typical values

View as

CVD TaC Coated Rings

Semicorex CVD TaC Coated Rings are high-performance flow guide components used in crystal growth furnaces to ensure precise gas control and thermal stability. Semicorex offers unmatched quality, engineering expertise, and proven performance in the most demanding semiconductor environments.*

Read More Send Inquiry

Guide Ring

Semicorex Guide Ring with CVD tantalum carbide coating is a highly reliable and advanced component for SiC single crystal growth furnaces. Its superior material properties, durability, and precision-engineered design make it an essential part of the crystal growth process. By choosing our high-quality Guide Ring, manufacturers can achieve enhanced process stability, higher yield rates, and superior SiC crystal quality.*

Read More Send Inquiry

CVD Coating Wafer Holder

Semicorex CVD Coating Wafer Holder is a high-performance component with a tantalum carbide coating, designed for precision and durability in semiconductor epitaxy processes. Choose Semicorex for reliable, advanced solutions that enhance your production efficiency and ensure superior quality in every application.*

Read More Send Inquiry

TaC Coating Half-moon Part

Semicorex TaC Coating Half-moon Part is a high-performance component designed for use in SiC epitaxy processes within LPE epitaxy furnaces. Choose Semicorex for unparalleled quality, precision engineering, and a commitment to advancing semiconductor manufacturing excellence.*

Read More Send Inquiry

Halfmoon Part for LPE

Semicorex Halfmoon Part for LPE is a TaC-coated graphite component designed for use in LPE reactors, playing a critical role in SiC epitaxy processes. Choose Semicorex for its high-quality, durable components that ensure optimal performance and reliability in demanding semiconductor manufacturing environments.*

Read More Send Inquiry

TaC Plate

Semicorex TaC Plate is a high-performance, TaC-coated graphite component designed for use in SiC epitaxy growth processes. Choose Semicorex for its expertise in manufacturing reliable, high-quality materials that optimize the performance and longevity of your semiconductor production equipment.*

Read More Send Inquiry

<1 2 3 4 5...11 >

Semicorex has been producing TaC Coating for many years and is one of the professional TaC Coating manufacturers and Suppliers in China. Once you buy our advanced and durable products which supply bulk packing, we guarantee the large quantity in quick delivery. Over the years, we have provided customers with customized service. Customers are satisfied with our products and excellent service. We sincerely look forward to becoming your reliable long-term business partner! Welcome to buy products from our factory.