Home > Products > TaC Coating

China TaC Coating Manufacturers, Suppliers, Factory

TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.



Tantalum carbide (TaC) is a compound that consists of tantalum and carbon. It has metallic electrical conductivity and an exceptionally high melting point, making it a refractory ceramic material known for its strength, hardness, and heat and wear resistance. The melting point of Tantalum Carbides peaks at about 3880°C depending on purity and has one of the highest melting points among the binary compounds. This makes it an attractive alternative when higher temperature demands exceed performance capabilities used in compound semiconductors epitaxial processes such as MOCVD and LPE.


Material data of Semicorex TaC Coating

Projects

Parameters

Density

14.3 (gm/cm³)

Emissivity

0.3

CTE (×10-6/K)

6.3

Hardness (HK)

2000

Resistance (Ohm-cm)

1×10-5

Thermal Stability

<2500℃

Graphite Dimension Change

-10~-20um (reference value)

Coating Thickness

≥20um typical value(35um±10um)



The above are typical values




View as  
 
SiC Shower Head

SiC Shower Head

Semicorex SiC Shower Head is an essential component in the epitaxial growth process, specifically designed to enhance the uniformity and efficiency of thin film deposition on semiconductor wafers. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Read MoreSend Inquiry
TaC Coating Planetary Plate

TaC Coating Planetary Plate

Semicorex TaC Coating Planetary Plate is a high-performance component designed specifically for MOCVD systems. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Read MoreSend Inquiry
TaC Coating Upper Halfmoon

TaC Coating Upper Halfmoon

Semicorex TaC Coating Upper Halfmoon is a specialized component engineered for high-performance epitaxial processes in semiconductor manufacturing. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Read MoreSend Inquiry
Tantalum Carbide Coating Halfmoon Part

Tantalum Carbide Coating Halfmoon Part

Semicorex Tantalum Carbide Coating Halfmoon Part is a highly specialized component designed for use in the epitaxial deposition process. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Read MoreSend Inquiry
TaC Coating Half-moon

TaC Coating Half-moon

Semicorex TaC Coating Half-moon is a specialized component crafted from tantalum carbide (TaC) coated graphite, designed for use in epitaxial processes. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Read MoreSend Inquiry
TaC Coating Graphite Cover

TaC Coating Graphite Cover

Semicorex TaC Coating Graphite Cover represents a cutting-edge solution in the realm of thermal applications for crystal growth and epitaxial (epi) processes. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Read MoreSend Inquiry
Semicorex has been producing TaC Coating for many years and is one of the professional TaC Coating manufacturers and Suppliers in China. Once you buy our advanced and durable products which supply bulk packing, we guarantee the large quantity in quick delivery. Over the years, we have provided customers with customized service. Customers are satisfied with our products and excellent service. We sincerely look forward to becoming your reliable long-term business partner! Welcome to buy products from our factory.
We use cookies to offer you a better browsing experience, analyze site traffic and personalize content. By using this site, you agree to our use of cookies. Privacy Policy
Reject Accept