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TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.

Tantalum carbide (TaC) is a compound that consists of tantalum and carbon. It has metallic electrical conductivity and an exceptionally high melting point, making it a refractory ceramic material known for its strength, hardness, and heat and wear resistance. The melting point of Tantalum Carbides peaks at about 3880°C depending on purity and has one of the highest melting points among the binary compounds. This makes it an attractive alternative when higher temperature demands exceed performance capabilities used in compound semiconductors epitaxial processes such as MOCVD and LPE.

Material data of Semicorex TaC Coating

Projects	Parameters
Density	14.3 (gm/cm³)
Emissivity	0.3
CTE (×10^-6/K)	6.3
Hardness (HK)	2000
Resistance (Ohm-cm)	1×10^-5
Thermal Stability	<2500℃
Graphite Dimension Change	-10~-20um (reference value)
Coating Thickness	≥20um typical value(35um±10um)

The above are typical values

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Porous Tantalum Carbide Rings

Semicorex Porous Tantalum Carbide Rings are high-performance refractory components specifically designed for the Physical Vapor Transport (PVT) process of Silicon Carbide (SiC) crystal growth, featuring a monolithic sintered structure that offers exceptional thermal stability and controlled gas permeability.*

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TaC-Coated Graphite Wafer Susceptors

Semicorex TaC-coated graphite wafer susceptors are the cutting-edge components ypically applied to stably support and position the semiconductor wafers during the advanced semiconductor epitaxial processes. Leveraging state-of-the-art production technologies and mature manufacturing experience, Semicorex is committed to supplying the custom-engineered TaC-coated graphite wafer susceptors with market-leading quality for our valued customers.

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CVD TaC Coated Susceptors

Semicorex CVD TaC Coated Susceptors are high-performance graphite susceptors with a dense TaC coating, designed to deliver excellent thermal uniformity and corrosion resistance for demanding SiC epitaxial growth processes. Semicorex combines advanced CVD coating technology with strict quality control to provide long-lasting, low-contamination susceptors trusted by global SiC epi manufacturers.*

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Tantalum Carbide Coated Guide Rings

Semicorex tantalum carbide coated guide rings are the high-performing ring components used in the semiconductor crystal growth equipment. They are specifically designed to create a suitable temperature gradient and stable airflow environment during crystal growth. By choosing Semicorex tantalum carbide coated guide rings, you will benefit from unparalleled coating technology and a highly efficient and stable production experience.

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TaC Coated Graphite Crucible

Semicorex TaC Coated Graphite Crucible is made by the Tantalum Carbide coating graphite through the CVD method, which is the most suitable material applied in the semiconductor manufacturing process. Semicorex is a company that consistently specializes in CVD ceramic coating and offers the best material solutions in the semiconductor industry.*

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TaC Coated Components in Epitaxial Growth

Semicorex TaC Coated Components in Epitaxial Growth is a precious machined part located in the air intake in the epitaxial process in semiconductor. Semicorex is a top-notch company that specializes in CVD TaC coating technology in China, and exports products worldwide.*

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Semicorex has been producing TaC Coating for many years and is one of the professional TaC Coating manufacturers and Suppliers in China. Once you buy our advanced and durable products which supply bulk packing, we guarantee the large quantity in quick delivery. Over the years, we have provided customers with customized service. Customers are satisfied with our products and excellent service. We sincerely look forward to becoming your reliable long-term business partner! Welcome to buy products from our factory.