Pancake susceptor, a round shape of wafer carrier used in semiconductor processing.
Epitaxy is a crucial step in semiconductor processing that grow the epitaxial layer on semiconductor wafers, in which the wafers are carried on the graphite susceptors. The qualities of graphite susceptors are key affections for the quality of the epi-wafers.
Graphite susceptors with silicon carbide coating
Semicorex supplies susceptors and components for all epitaxy reactors, including barrel susceptors and pancake susceptors. We use high purity graphite and CVD SiC coating.