As the professional manufacture, we would like to provide you Wafer Heater. Heaters for deposition equipment demand uniform thermal distribution across the wafer, along with high purity and plasma resistance. Semicorex supplies CVD silicon carbide coated heating applications including heaters and crucibles, our advanced heating components are suitable for vacuum deposition environment ALD-CVD-PVD processes.
Semicorex SiC Heating Filament is a silicon carbide coated graphite heater designed for wafer heating in advanced semiconductor manufacturing. Choosing Semicorex means selecting a trusted partner that delivers high-purity materials, precision customization, and long-lasting performance for the most demanding thermal processes.*
Read MoreSend InquiryThe CVD SiC coating of Semicorex SiC Coating Heater offers superior performance in protecting heating elements from the harsh, corrosive, and reactive environments often encountered in processes such as Metal-Organic Chemical Vapor Deposition (MOCVD) and Epitaxial Growth.**
Read MoreSend InquiryThe MOCVD Heater by Semicorex is a highly advanced and meticulously engineered component that offers a multitude of advantages, including exceptional chemical purity, thermal efficiency, electrical conductivity, high emissivity, corrosion resistance, inoxidizability, and mechanical strength.**
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