China Cantilever Paddle Manufacturers, Suppliers, Factory

During processing, semiconductor wafers must be heated in specialized furnaces. The reactor comprises elongated, cylindrical tubes, in which wafers are positioned on the wafer boats at predetermined, equidistant.In order to survive the processing conditions within the chamber, and to minimize waste to the wafers from the processing equipment, the wafer boats and many other devices used in wafer processing are fabricated of a material such as silicon carbide (SiC).

The boats, loaded with a batch of wafers to be processed, are positioned on long cantilevered paddles, by which they may be inserted into and withdrawn from the tubular furnaces and reactors. The paddles include a flattened carrier section upon which one or more boats may be positioned, and a long handle, positioned at one end of the flattened carrier section, by which the paddle can be handled.

Cantilever paddle is recommended to using recrystallized silicon carbide with a CVD SiC thin layer, which is high purity and best choice for the components in semiconductor processing.

Semicorex can provide customize service according to the drawings and working environment.

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SiC Cantilever Paddle

Semicorex SiC (Silicon Carbide) Cantilever Paddle is a crucial component used in semiconductor manufacturing processes, particularly in diffusion or LPCVD (Low-Pressure Chemical Vapor Deposition) furnaces during processes like diffusion and RTP (Rapid Thermal Processing). The SiC Cantilever Paddle is to carry semiconductor wafers securely within the process tube during various high-temperature processes such as diffusion and RTP. It serves the purpose of supporting and transporting wafers within the process tube of these furnaces. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

Silicon Carbide Cantilever Paddle

Semicorex silicon carbide cantilever paddle is a specialized component used in furnaces for various thermal processing applications. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

SiC Ceramic Cantilever Paddle

Large wafer loading force silicon carbide SiC ceramic cantilever paddle is suitable for a robot automatic loading and handling system because it has stable performance, non-deformation in high temperature and large wafer loading force. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.