China Semiconductor Components Manufacturers, Suppliers, Factory

As the professional manufacture, we would like to provide you Semiconductor Components. Semicorex is your partner for improving in semiconductor processing. Our silicon carbide coatings are dense, high temperature and chemical resistant, which are often used in the whole cycle of semiconductor manufacturing, including semiconductor wafer & wafer processing and semiconductor fabrication.

High-purity SiC coated components are crucial to processes in the semiconductor. Our offering ranges from graphite consumables for crystal growing hot zones (heaters, crucible susceptors, insulation), to high-precision graphite components for wafer processing equipment, such as silicon carbide coated graphite susceptors for Epitaxy or MOCVD.

Advantages for semiconductor processes

The thin film deposition phases such as epitaxy or MOCVD, or wafer handling processing such as etching or ion implant must endure high temperatures and harsh chemical cleaning. Semicorex supplies high-purity silicon carbide (SiC) coated graphite construction provides superior heat resistance and durable chemical resistance, even thermal uniformity for consistent epi layer thickness and resistance.

Chamber Lids →
Chamber Lids used in crystal growth and wafer handling processing must endure high temperatures and harsh chemical cleaning.

End Effector →
End effector is the robot's hand which moves semiconductor wafers between positions in wafer processing equipment and carriers.

Inlet Rings →
SiC coated gas inlet ring by MOCVD equipment Compound growth has high heat and corrosion resistance, which has great stability in extreme environment.

Focus Ring →
Semicorex supplies Silicon Carbide Coated focus ring is really stable for RTA, RTP or harsh chemical cleaning.

Wafer Chuck →
Semicorex ultra-flat ceramic vacuum wafer chucks is high purity SiC coated using in the wafer handling process.