China Shower Head Manufacturers, Suppliers, Factory

A SiC (silicon carbide) showerhead is a specialized component used in various industrial processes, particularly in the semiconductor manufacturing industry. It is designed to distribute and deliver process gases evenly and precisely during chemical vapor deposition (CVD) and epitaxial growth processes.

The showerhead is shaped like a disk or plate with multiple evenly distributed holes or nozzles on its surface. These holes serve as the outlets for the process gases, allowing them to be injected into the process chamber or reaction chamber. The size, shape, and distribution of the holes can vary depending on the specific application and process requirements.

One of the key advantages of using a SiC showerhead is its excellent thermal conductivity. This property enables efficient heat transfer and uniform temperature distribution across the showerhead surface, preventing hot spots and ensuring consistent process conditions. The enhanced thermal conductivity also allows for rapid cooling of the showerhead after the process, minimizing downtime and increasing overall productivity.

SiC showerheads are highly durable and resistant to wear and tear, even under prolonged exposure to corrosive gases and high temperatures. This longevity translates into extended maintenance intervals and reduced equipment downtime, resulting in cost savings and improved process reliability.

In addition to its robustness, SiC showerheads offer excellent gas distribution capabilities. The precisely engineered hole patterns and configurations ensure uniform gas flow and distribution over the substrate surface, promoting consistent film deposition and enhanced device performance. The uniform gas distribution also helps minimize variations in film thickness, composition, and other critical parameters, contributing to improved process control and yield.

Semicorex offers a low resistivity sintered silicon carbide semiconductor shower head.  We have the capability to custom engineer and supply advanced ceramic materials utilizing a variety of unique capabilities.