Silicon Carbide Boats

Semicorex Silicon Carbide Boats exhibit exceptional thermal stability, allowing them to withstand the extreme temperatures required for oxidation and diffusion processes. Their excellent thermal shock resistance minimizes the risk of cracking or deformation, ensuring prolonged operational longevity. The high-density SiC composition provides superior mechanical strength, maintaining structural integrity even under continuous thermal cycling. This exceptional resistance to mechanical stress reduces the likelihood of wafer contamination and breakage, contributing to higher process yields. Furthermore, SiC boats possess outstanding chemical resistance, remaining inert to aggressive process gases used in oxidation and diffusion steps. This characteristic prevents unwanted reactions that could compromise wafer purity and production efficiency.

Silicon Carbide Boats are primarily utilized in oxidation and diffusion furnaces, where precise control over wafer exposure to high temperatures and reactive gases is essential. They support wafers during thermal oxidation to grow high-quality silicon dioxide layers and facilitate uniform doping through controlled exposure to dopant gases. Additionally, they provide a stable platform for annealing and other high-temperature treatments that require prolonged heat exposure.

Compared to traditional quartz and graphite boats, Silicon Carbide Boats offer unmatched durability, longevity, and performance. Their ability to withstand harsh thermal and chemical environments while minimizing contamination makes them the preferred choice for high-precision semiconductor manufacturing. With a focus on quality and innovation, our Silicon Carbide Boats deliver superior performance, ensuring high yields and efficient wafer processing for semiconductor manufacturers worldwide. Whether for advanced node technologies or legacy semiconductor fabrication, these boats provide a reliable solution to meet stringent industry requirements.

(1)Carrying and protection: The silicon carbide boats carry semiconductor materials such as wafers through its internal brackets or slots, and uses the high temperature and corrosion resistance of silicon carbide materials to protect the wafers from the external environment.

(2)Uniform heating: The silicon carbide boat allows the wafers inside to be heated evenly during the heat treatment process. This helps to ensure that the temperature and reaction rate of each part of the wafer remain consistent during the heat treatment process, thereby improving the yield and quality of the wafer.

There are currently three main types of silicon carbide ceramic materials: reaction sintering, pressureless sintering, and recrystallization sintering. In most applications, reaction sintered silicon carbide is a more suitable and cost-effective product. Recrystallized SiC boats usually sinter and process several unit parts first, then use Si paste to combine the parts into a boat at high temperature, and finally apply CVD-SiC coating (about 100um). Since recrystallization is porous, if there is no SiC coating, it will also introduce particals into the semiconductor process. This type of recrystallized SiC boat with CVD-SiC coating has the longest manufacturing process and is very expensive. Compared with SiC coated graphite boats, CVD-SiC coated recrystallized SiC boats have no CTE mismatch problem.