Ceramic End Effector

Semicorex is your partner for advanced graphite components and assemblies to support higher throughput and better yields in your semiconductor processing equipment. Our materials experts are ready to work with you to develop the optimal right solution for your wafer handling, heating, and processing requirements. Our Ceramic End Effector has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Ceramic End Effector is the robot's hand which move semiconductor wafers between positions in wafer processing equipment and carriers. End effector must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle wafers without damaging devices or producing particulate contamination. Our high-purity silicon carbide Ceramic End Effector provide superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance.

At Semicorex, we focus on providing high-quality, cost-effective Ceramic End Effector, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.

Parameters of Ceramic End Effector

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300