SiC Coated Wafer Heater

Semicorex is a leading independently owned manufacturer of Silicon Carbide Coated Graphite, Precision Machined High Purity Graphite focusing on the Silicon Carbide Coated Graphite, Silicon Carbide Ceramic, MOCVP areas of semiconductor manufacturing. Our SiC Coated Wafer Heater has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Semicorex SiC Coated Wafer Heater can operate in the high temperature furnace with over 3000 °C in an inert atmosphere, 2200°C in vacuum. The high-purity SiC Coated Wafer Heater provides superior heat resistance, even thermal uniformity for consistent epi layer thickness and resistance, and durable chemical resistance. Fine SiC crystal coating provides a clean, smooth surface, critical for handling since pristine wafers contact the susceptor at many points across their entire area.
At Semicorex, we focus on providing high-quality, cost-effective SiC Coated Wafer Heater, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.

Parameters of SiC Coated Wafer Heater

Technical Specification	VET-M3
Bulk Density (g/cm3)	≥1.85
Ash Content (PPM)	≤500
Shore Hardness	≥45
Specific Resistance (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Grain Size (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

Features of SiC Coated Wafer Heater

- High purity SiC coated graphite
- Superior heat resistance & thermal uniformity
- Fine SiC crystal coated for a smooth surface
- High durability against chemical cleaning
- Material is designed so that cracks and delamination do not occur.