Silicon Wafer Heater

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite in China. We provide heaters, support crucibles, heat shields and insulating components for single crystal growing processes and materials. We focus on semiconductor industries, our Silicon Wafer Heater has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

Semicorex Silicon Wafer Heater is silicon carbide coated using MOCVD, which can operate in the high temperature furnace with over 3000 °C in an inert atmosphere, 2200°C in vacuum. SiC Coating is a dense, wear-resistant silicon carbide (SiC) coating.
Our Silicon Wafer Heater has high corrosion and heat resistance properties as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process.
At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our Silicon Wafer Heater has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.

Parameters of Silicon Wafer Heater

Technical Specification	VET-M3
Bulk Density (g/cm3)	≥1.85
Ash Content (PPM)	≤500
Shore Hardness	≥45
Specific Resistance (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Grain Size (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

Features of Silicon Wafer Heater

- Silicon Carbide coatings used CVD method to improve service life.
- Thermal insulation made of high-performance purified rigid carbon.
- Both the graphite substrate and silicon carbide layer have a high thermal conductivity, and excellent heat distribution properties.
- High-purity graphite and SiC coating for pinhole resistance and higher lifetime

We can provide anti-oxidation and long life span graphite crucible, graphite mold and all parts of graphite heater.