SiC Porous Ceramic Vacuum Chucks

SiC porous ceramic vacuum chucks typically consist of the silicon carbide porous ceramic plate and the dense alumina ceramic base. There are numerous uniformly distributed and interconnected micro-pores inside the silicon carbide porous ceramic plate for vacuum delivery. During operation, SiC porous ceramic vacuum chucks are connected to the external vacuum pumps. Under the negative pressure effect, a vacuum environment is generated between the workpiece and the chuck, thus ensuring that SiC porous ceramic vacuum chucks firmly clamp and fix the workpiece onto their surface.

The advantages of Semicorex SiC porous ceramic vacuum chucks

1. Uniform and Stable Adsorption Capacity

Semicorex SiC porous ceramic vacuum chucks are constructed using micro-porous ceramic technology, which involves the use of uniformly sized nano-powders. Thanks to this technology,   SiC porous ceramic vacuum chucks exhibit excellent porosity and a uniformly dense pore structure. Therefore, a uniform adsorption force can be generated over the entire contact surface between the vacuum chuck and the workpiece, which significantly reduces workpiece damage caused by localized stress concentration.

2. Superior Flatness and Dimensional Accuracy

Semicorex SiC porous ceramic vacuum chucks adopt sophisticated CNC processing and precision surface finishing, achieving exceptional flatness and dimensional accuracy. The surface flatness of the vacuum chucks can be controlled within the micron-level tolerance range based on different dimensions and application scenarios. This effectively avoids the risk of edge chipping and fragmentation caused by uneven force during the adsorption process.

3. Clean, Particle-Free Operation

Semicorex SiC porous ceramic vacuum chucks processed by isostatic pressing and high-temperature sintering possess a uniformly dense structure, delivering low outgassing and particle generation. In addition, each vacuum chuck from Semicorex undergoes strict ultrasonic cleaning and particle inspection before shipment. This greatly prevents workpiece contamination caused by particle shedding during operating, thereby meeting strict process cleanliness standards

4. Excellent Durability and Lifespan

Fabricated from carefully selected high-grade alumina and silicon carbide material, Semicorex SiC porous ceramic vacuum chucks are characterized by superior mechanical strength, wear resistance, corrosion resistance, and thermal resistance. With these superior characteristics,  Semicorex SiC porous ceramic vacuum chucks are well-suited for the challenging operating conditions with high temperature, high humidity, and high corrosivity.