SiC Boat Holders

Semicorex SiC Boat Holders are precision support devices designed to hold wafer boats during high-temperature processes in semiconductor fabrication. Made from high-purity silicon carbide (SiC), these holders exhibit excellent thermal stability, chemical resistance, and mechanical rigidity, essential features when used in processes such as diffusion, oxidation, and epitaxial growth.

In demanding semiconductor fabrication environments, protecting wafer integrity and minimizing contamination is crucial. SiC Boat Holders offer a solid, inert platform that can tolerate extreme furnace environments while maintaining integrity without deformation and without release of contaminants. Their chemical inertness allows their use with reactive process gasses, while their thermal transmittance promotes even heating of the surface of the wafers for consistent processing.

Each SiC Boat Holder is manufactured with a high tolerance for dimensional accuracy, making them easy to accommodate and adapt to any wafer boat type and automated load configurations. Their rigid structure not only creates strong, stable, and adequate support for the wafer boats but also reduces the chance micro-vibrations or positional shifts can have on the wafers. Additionally, silicon carbide has excellent wear resistance and can handle repeated heat cycling to provide a long life resulting in little downtime and replacement of vial parts.

The unique attributes of silicon carbide can provide added benefits with regard to process cleanliness. Unlike metals or lower grade ceramic materials, SiC does not flake, outgas, or chemically degrade under extreme temperatures or in plasma. This makes SiC boat holders a great tool for manufacturers trying to limit cleanroom contamination for advanced semiconductor nodes that require high yield and purity.

Semicorex SiC Boat Holders are produced using unique molding and sintering processes that ensure uniform microstructure and mechanical performance between batches and across multiple boat holders. For example, holder shape or slot configuration can be customized, as well as the type of mounting.

Whether used in vertical furnaces or horizontal reactors, customizing Semicorex SiC Boat Holders will meet the tolerances for next-generation semiconductor manufactruring. If you choose Semicorex products, you will know you worked with a supplier that is knowledgeable, dedicated to material excellence, and strives to continuously innovate ceramic components with respect to reliability and delivery.