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ICP Plasma Etching Plate

ICP Plasma Etching Plate

Semicorex's ICP Plasma Etching Plate provides superior heat and corrosion resistance for wafer handling and thin film deposition processes. Our product is engineered to withstand high temperatures and harsh chemical cleaning, ensuring durability and longevity. With a clean and smooth surface, our carrier is perfect for handling pristine wafers.

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Product Description

When it comes to thin film deposition and wafer handling, trust Semicorex's ICP Plasma Etching Plate. Our product offers superior heat and corrosion resistance, even thermal uniformity, and optimal laminar gas flow patterns. With a clean and smooth surface, our carrier is perfect for handling pristine wafers.

Our ICP Plasma Etching Plate is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.

Contact us today to learn more about our ICP Plasma Etching Plate.

Parameters of ICP Plasma Etching Plate

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of ICP Plasma Etching Plate

- Avoid peeling off and ensure coating on all surface

High temperature oxidation resistance: Stable at high temperatures up to 1600°C

High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.

Corrosion resistance: high hardness, dense surface and fine particles.

Corrosion resistance: acid, alkali, salt and organic reagents.

- Achieve the best laminar gas flow pattern

- Guarantee evenness of thermal profile

- Prevent any contamination or impurities diffusion

Hot Tags: ICP Plasma Etching Plate, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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