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ICP Etching Wafer Holder

ICP Etching Wafer Holder

Semicorex's ICP etching wafer holder is the perfect solution for high-temperature wafer handling processes such as epitaxy and MOCVD. With a stable, high-temperature oxidation resistance of up to 1600°C, our carriers ensure even thermal profiles, laminar gas flow patterns, and prevent contamination or impurities diffusion.

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Product Description

Looking for a reliable supplier of wafer carriers for your epitaxy equipment? Look no further than Semicorex. Our ICP etching wafer holder is engineered specifically for high-temperature, harsh chemical cleaning environments. With a fine SiC crystal coating, our carriers provide superior heat resistance, even thermal uniformity, and durable chemical resistance.
Our ICP Etching Wafer Holder is designed to achieve the best laminar gas flow pattern, ensuring evenness of thermal profile. This helps to prevent any contamination or impurities diffusion, ensuring high-quality epitaxial growth on the wafer chip.
Contact us today to learn more about our ICP Etching Wafer Holder.

Parameters of ICP Etching Wafer Holder

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of ICP Etching Wafer Holder

- Avoid peeling off and ensure coating on all surface

High temperature oxidation resistance: Stable at high temperatures up to 1600°C

High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.

Corrosion resistance: high hardness, dense surface and fine particles.

Corrosion resistance: acid, alkali, salt and organic reagents.

- Achieve the best laminar gas flow pattern

- Guarantee evenness of thermal profile

- Prevent any contamination or impurities diffusion

Hot Tags: ICP Etching Wafer Holder, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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