Horizontal Silicon Carbide Boats

Semicorex horizontal silicon carbide boats are integrally formed using 3D printing technology and then fabricated through high-temperature sintering. Purpose-built to fit diverse high-temperature horizontal furnace sizes, these components are widely applied to firmly secure wafer retention in critical high-temperature semiconductor manufacturing processes, including diffusion, oxidation, and chemical vapor deposition.

Physicochemical Properties of Silicon Carbide

The advantages of Semicorex horizontal silicon carbide boats

1.Stable Support and Position

The unparalleled material strength and hardness give Semicorex horizontal silicon carbide boats excellent supporting capacity, which enables them to stably carry multiple wafers simultaneously. Through precision slot machining, Semicorex horizontal silicon carbide boats can firmly fix and securely hold semiconductor wafers. The evenly spaced slot structure ensures that wafers maintain a fixed position throughout the entire processing cycle, thereby guaranteeing the consistency and precision of semiconductor manufacturing processes.

2.Compatibility with Complex Operating conditions

Thanks to their superior high-temperature resistance and corrosion resistance, Semicorex horizontal silicon carbide boats are capable of withstanding rigorous operating environments, such as high-temperature atmospheres of oxygen, nitrogen, or low-concentration hydrogen chloride. These exceptional material properties can effectively prevent corrosion and damage caused by high-temperature corrosive gases, which greatly extend the operational lifespan of the boats.

3. Exceptional Cleanliness Performance

Different from conventional silicon carbide-coated graphite boats, Semicorex horizontal silicon carbide boats are fabricated from semiconductor-grade, high-purity silicon carbide (99.999%) with ultra-low impurity content. This premium material selection eliminates the risk of contaminant outgassing or coating peeling, even when exposed to high-temperature and harsh corrosive environments. Additionally, each of our silicon carbide boats is subjected to stringent ultrasonic cleaning processes before vacuum packaging, which guarantees compliance with the cleanliness standards required by advanced semiconductor manufacturing processes.