Silicon carbide ceramic paddles are typically installed near the furnace opening or process chamber, with one end fixed and the other end extending into the furnace or process chamber. During operating processing, silicon carbide ceramic paddles precisely position the wafer carrier carrying wafers at the designated location inside the furnace or process chamber. After processing, the cantilevered paddles retrieve the carrier and move it out of the furnace or chamber and hand it over to the robotic arm for the next stage of handling.

The advantages of Semicorex silicon carbide ceramic paddles

1. Superior properties and reliable quality

Semicorex silicon carbide ceramic paddles deliver excellent high-temperature stability, high strength, high hardness, chemical stability and low coefficient of thermal expansion. With these superior properties, Semicorex silicon carbide ceramic paddles can long-time withstand the challenging operating conditions, such as high temperatures, severe corrosion, heavy loading, and frequent mechanical operation.

2. Precise supporting and transporting

Relying on the excellent supporting and transporting performance, Semicorex silicon carbide ceramic paddles can accurately fix wafer carriers in place to ensures the concentricity of wafers relative to furnace tubes, which significantly reduces the process inconsistency caused by wafer shaking and misalignment during the process.

3. Highly efficient automated operation

Semicorex silicon carbide ceramic paddles typically work in conjunction with robotic automated loading and handling systems to achieve rapid wafer loading and unloading. This significantly shortens process cycles in semiconductor and photovoltaic manufacturing, improves production efficiency, and reduces manual operation costs and error risks.

The applications of Semicorex silicon carbide ceramic paddles

1. Photovoltaic cell manufacturing

Semicorex silicon carbide ceramic paddles are well-suited to the thermal processes of photovoltaic cells, such as the diffusion, LPCVD, and PECVD of TOPCon and PERC cells. By achieving the uniformity and stability of the process, these paddles contribute to the improvement of photovoltaic cell conversion efficiency.

2. Semiconductor chip manufacturing

Standing as the essential supporting and transporting components, Semicorex silicon carbide ceramic paddles are widerly applied in the processes such as lithography, etching, and deposition during semiconductor chip manufacturing, enabling constantly stable transfer and precise positioning of wafers.