SiC Tubes

Semicorex SiC tubes (SiC furnace tubes) are premium components heavily utilized in the semiconductor industry because of their ideal thermal stability, mechanical strength and extreme resistance to aggressive chemicals over a range of applications. Semicorex SiC tubes have been designed to survive the most harsh conditions associated with high-temperature processing. SiC tubes are clearly a preferred and superior material for diffusion furnaces, LPCVD/PECVD systems and in environments used for epitaxial growth in which material contamination and thermal differential are key considerations.

Semicorex SiC Tubes are manufactured from ultra-high purity SiC powders utilizing advanced sintering methodologies and process control techniques that preserve the purity of the SiC. The result is that SiC tubes have optimal thermal conductivity, low thermal expansion characteristics, and have weight distributed along the length of the tube, effectively minimizing thermal stress, even when exposed to rapid thermal cycling. Thus, utilizing SiC tubes provides high-ath respecturance during continuous high-temperature processes (up to 1600 °C) - thus ensuring uniformity in semiconductor manufacturing processes, enhancing overall efficiency on consistent scales.

The primary advantage of SiC, is that it is chemically inert. SiC is virtually non-porous (complying with ASTM-G654 GP-4 grading) and unsurpassed when it comes to resistance corrosive gases and reactive chemicals used in semiconductor development including HCl, NH₃, SiH₄ etc. It is also noted that quartz tubes will degrade and deform with use over time in aggressive atmospheres however SiC tubes retain their integrity in extreme environments providing dimensional stability and increasing service time while minimizing throughput slowdowns related to tube changes and replacements. The key benefits for semiconductor manufacturing is clear; using SiC tubes can decrease the total cost of ownership down range by weeks or even months while maintaining reliability as it relates to industrial processes.

Semicorex SiC tubes come in many diameters, lengths, and custom specifications to accommodate different furnace designs and processing requirements. The inner surfaces can be polished, which improves cleanliness, reduces particle generation, and is an important detail in ultra-clean semiconductor spaces. The use of Semicorex SiC tubes can help reduce contamination risk and contributes to increased wafer yields with tight tolerances and improved surface quality.

Semicorex SiC expertise includes years of silicon carbide processing with a focus on precise engineering and quality control to meet the rigorous and demanding quality standards of the semiconductor industry. Our tubes are tested and validated with inspections, which are critical for ensuring purity, density, and performing within the most extreme thermal environments. Semicorex also provides technical support and custom design options to assist with optimizing the furnace system for specific applications.

Whether manufacturing logic chips, power devices, or optoelectronics, Semicorex SiC tubes present a reliable, durable option for high temperature processing. By selecting Semicorex you are not only ensuring efficiency but a longer term stable, efficient process for semiconductor fabrication.