Semicorex SiC Oxidation Tube is a high-performance component used in SiC tube furnaces for advanced semiconductor thermal processing. It is designed for long-term stability in extreme conditions. Choose Semicorex for our superior material purity, tight dimensional control, and consistent product quality, helping you achieve optimal results in every high-temperature run.*
Semicorex SiC Oxidation Tube is constructed from high-purity silicon carbide ceramic designed for oxidation, diffusion, or annealing processes typically performed at 1600°C. As part of an SiC furnace, horizontal or vertical, this is the controlled environment that the wafers are heated in while oxidizing. The function of the oxidation tube is to provide a clean, uniform and stable environment for the thermal treatment of silicon carbide (SiC) wafers in the fabrication of power devices and wide bandgap semiconductors, as aperture of the constant potential oxidizing process, the oxidation tube acts as a consumable targetable for first use. While quartz and alumina tubes are often found breaking down over time through devitrification, warping, or chemical breakdown, silicon carbide has exceptional durability against thermal shock challenges, mechanical property enhancement, and chemical inertness. These factors yield silicon carbide as a great option for oxidation tubes in high reliability, high throughput environments.
Using advanced forms of forming such as cold isostatic pressing and pressureless sintering (or recrystallization), Semicorex produces SiC oxidation tubes that have a dense, gas-tight, and homogeneous microstructure. This provides strength without the risk of porosity, allowing the oxidation process to proceed without contamination. SiC has very high thermal conductivity, allowing for uniform thermal distribution to the wafer load zone and thus reducing thermal gradients that can cause warped wafers or defects. The tube's resistance to acids, bases, and reactive gases prevent unwanted chemical interactions with the wafer surface and through the furnace environment as well.
It does not creep, it does not deform. The tube does not have to be replaced after several cycles of production—it is long-term thermal cycling environments that would otherwise destroy lesser materials. Therefore, no high frequency interruptions mean low operating costs, and this keeps the process flow without any disruptions. This also reduces contamination risks that can easily lower yield performance in next-generation semiconductor devices where trace impurities play a critical role. Semicorex produces both standard and fully customized tube dimensions for any furnace platform and recipe used. Inner and outer diameter, length, wall thickness, and surface finish are all parameters that may require an adjustment to address different specific thermal and mechanical needs; from laboratory-scale R&D furnaces up to large manufacturing lines—in each case where the tube needs machining, cleaning, and inspection to guarantee performance.
Quality control begins with dimensional checks, material density tests, and thermal cycle reliability validation for every single SiC oxidation tube. A strong material traceability system logs the product from its raw powder stage up to final inspection. That kind of quality gives customers a steady hand in the long-term stability and reproducibility of our SiC oxidation tubes.
Choose Semicorex, and get a partner in a supplier who combines advanced ceramic engineering with broad process control and responsive technical support by working together from the very beginning. We learn about your specific furnace environment, process requirements, and integration challenges so that we can offer you customized solutions improving your process results as well as tool uptime.
Semicorex SiC Oxidation Tube delivers the best possible thermal performance with chemical stability and mechanical strength. It becomes the heart of any high-temperature SiC processing system by providing a uniform thermal environment during oxidation and annealing advanced semiconductor materials. For manufacturers who require furnace components to be reliable, clean, and long-lasting, Semicorex will be a product choice supported by knowledge and experience as well as a standard of delivering nothing short of the best.