SiC-Coated Gas Diversion Discs

Standing as the fine example of advanced semiconductor-grade materials and cutting-edge manufacturing technologies, Semicorex SiC-coated gas diversion discs are precisely manufactured from high-purity graphite as their matrices with a dense SiC coating via chemical vapor deposition. Gas diversion discs are mainly designed to distribute reaction gas evenly across the wafer surface to ensure full reactions during processing, thus facilitating the formation of consistent and uniform single-crystal thin films.

The advantages of Semicorex SiC-coated gas diversion discs

1.High material purity

Semicorex upholds stringent product quality standards starting from careful material selection. Thanks to this strict purity control of raw material, Semicorex SiC-coated gas diversion discs deliver low impurity content and boast outstanding cleanliness. This can significantly prevent metal ions and other contaminants from compromising semiconductor epitaxial processes.

2.Superior thermal stability

The components used in these systems are required to have exceptional thermal stability because semiconductor epitaxial equipment typically operates at temperatures above 1400°C. This exceptional thermal stability can ensure Semicorex SiC-coated gas diversion discs withstand the challenging high-temperature operating conditions and can effectively prevent impurity release caused by high temperature during operation, which helps guarantee the quality and yield of epitaxial wafers.

3.Remarkable high temperature corrosion resistance

Unprotected graphite matrices are prone to corrosion and particle generation, which is why gas diversion discs are commonly treated with a silicon carbide coating to enhance their corrosion resistance. Covered with a dense SiC coating,  Semicorex SiC-coated gas diversion discs offer excellent oxidation and chemical corrosion resistance, which enables them function steadily over long service life even under challenging high-temperature and corrosive operating conditions.

4.Flexible customization capabilities

Semicorex is equipped with multiple advanced processing equipment, such as CNC machining equipment, surface grinding machines, and ultrasonic drilling equipment,  offering experienced processing capabilities. Semicorex is able to offer flexible customization services according to customer drawings and tailor the dimensions, tolerances, surface flatness, hole diameters, and hole spacings of SiC-coated gas diversion discs to ensure seamless compatibility with customers' epitaxial equipment.