SiC Ceramic Pin Chucks

As advanced semiconductor processes impose higher standards for fabrication precision, the material selection, structural layout and adsorption capability of wafer chucks have become crucial factors determining semiconductor chips’ production efficiency and yield. Combining ultra-high machining precision, stable material properties and long service life, Semicorex SiC ceramic pin chucks realize firm wafer holding and precise wafer positioning even under harsh wafer processing conditions, wining extensive approval from numerous semiconductor fabs.

High-standard material selection for stable operating performance

Semicorex SiC ceramic pin chucks are fully constructed of high-density sintered silicon carbide, delivering multiple superior material characteristics listed below：

1. Outstanding high-temperature resistance

2. Reliable chemical corrosion resistance

3. Remarkable hardness and wear resistance

4. High purity and low impurity contamination

5. High density and low particle shedding

Special pin-structured design for superior wafer adsorption performance

Wafer slippage and insufficient adsorption are the common issues encountered in precision semiconductor fabrication. Semicorex adopts a pin-structured design to optimize the adsorption performance of our wafer chucks, offering the following advantages:

1. The pin structure minimizes chuck-wafer contact, preventing wafer contamination and stress-induced damage while enhancing adsorption force per unit area for reliable wafer fixation.

2. Semicorex SiC ceramic pin chucks feature numerous evenly arranged pins on their adsorption surface, ensuring uniform adsorption across all positions of wafers.

Flexible Customization for Seamless Equipment Matching

Semicorex is equipped with a veteran technical team and complete integrated manufacturing workflows and owns robust machining capability, supporting small-batch trial runs and large-scale mass production of SiC ceramic pin chucks. Customization services are available at Semicorex. We can tailor-make our SiC ceramic pin chucks in geometry, overall dimensions, chuck parallelism, surface flatness, pins’ quantity, height as well as pitch in accordance with customers’ requirements and equipment types, making them fit diverse working conditions for seamless equipment integration.