RTA SiC Wafer Carriers

Rapid thermal annealing is a thermal processing technique widely used in semiconductor manufacturing. Using halogen infrared lamps as the heat source, it heats wafers or semiconductor materials rapidly to temperatures between 300 ℃ and 1200℃ with an extremely fast heating rate, followed by rapid cooling. Rapid thermal annealing process can eliminate residual stress and defects inside wafers and semiconductor materials, improving material quality and performance. RTA SiC wafer carriers are the indispensable carrying component widely used in RTA process, which can stably support the wafer and semiconductor materials during operating and ensures consistent thermal treatment effect.

The advantages of Semicorex RTA SiC wafer carriers

1. Superior mechanical strength and hardness

Semicorex RTA SiC wafer carriers deliver excellent mechanical strength and hardness and are able to withstand various mechanical stresses under harsh RTA conditions while remaining dimensionally stable and durable. With their excellent hardness, the surface of the RTA SiC wafer carriers is less prone to scratches, which provides a flat, smooth support surface that effectively prevents wafer damage caused by carrier scratches.

2. Exceptional thermal conductivity

Semicorex RTA SiC wafer carriers possess exceptional thermal conductivity, enabling them to effectively disperse and conduct heat. They can deliver precise temperature control during rapid thermal processing, which significantly lowers the risk of thermal damage to wafers and improves the uniformity and consistency of the annealing process.

3. Outstanding thermal stability

Silicon carbide features a melting point of around 2700°C and maintains outstanding stability at continuous operating temperatures of 1350–1600°C. This gives Semicorex RTA SiC wafer carriers superior thermal stability for high-temperature RTA operating conditions. In addition, with their low coefficient of thermal expansion, Semicorex RTA SiC wafer carriers can avoid cracking or damage caused by uneven thermal expansion and contraction during rapid heating and cooling cycles.

4. Excellent low-contamination performance

Made from careful-selected high-purity silicon carbide, Semicorex RTA SiC wafer carriers feature low impurity content. Thanks to their remarkable chemical resistance, Semicorex RTA SiC wafer carriers are able to avoid corrosiond from process gases during rapid thermal annealing, thereby minimizing wafer contamination caused by the reactants and meeting the strict cleanliness requirements of semiconductor manufacturing processes.