Silicon Carbide Ceraminc Wafer Boats

Premium material selection

The excellent properties of Semicorex silicon carbide ceramic wafer boats are attributable to high-quality raw materials. Made from semiconductor-grade SiSiC material and covered with a CVD SiC coating, Silicon carbide ceramic wafer boats exhibit the following excellent properties.

1.Ultra-high purity, free from metal impurity release

Substrate impurity: ＜100 ppm

CVD SiC coating impurity: ＜1 ppm

2.Superior thermal stability

Silicon carbide ceramic wafer boats are able to perform steadily in the 1250℃ high-temperature conditions, delivering minimal deformation and creep resistance.

3.High mechanical strength

Silicon carbide possesses high hardness and wear resistance, enabling Semicorex silicon carbide ceramic wafer boats to resist scratches, abrasions, and damage, thus performing well during long-term operation and being resistant to damage.

4.Exceptional corrosion resistance

Because silicon carbide is resistant to corrosion from strong acids and alkalis,  Semicorex silicon carbide ceramic wafer boats can maintain its structural integrity and functional performance even under highly corrosive working conditions.

Optimized structural design

Semicorex silicon carbide ceramic wafer boats are designed for batch wafer processing, their optimized structural framework ensures stable batch wafer supporting and consistent process stability for each wafer.

1.3-post vertical support structure

The vertical structure of Semicorex silicon carbide ceramic wafer boats enables them to seamlessly match vertical furnace applications. With this structure,  emicorex silicon carbide ceramic wafer boats can facilitate homogeneous circulation of process gases and uniform distribution of thermal energy within the high-temperature furnace.

2.Uniformly distributed slot pinches

Semicorex silicon carbide ceramic wafer boats are equipped with multiple precision-machined slot pinches on their support posts. Their evenly spaced slot pinches achieve appropriate slot spacing, which enables silicon carbide ceramic wafer boats to firmly secure semiconductor wafers, thereby contributing to improving the consistency of wafer thermal processing results.

With so many excellent performance and functions, Semicorex silicon carbide ceramic wafer boats are widely used in core processes of semiconductor wafer manufacturing, such as oxidation, diffusion, ion implantation, and high-temperature annealing.