Silicon Carbide Ceramic Cantilever Paddles

Semicorex silicon carbide ceramic cantilever paddles are produced by high temperature sintering the one-step 3D-printed green body, followed by the coating treatment via chemical vapor deposition. During actual operation, silicon carbide ceramic cantilever paddles are actuated by the mechanical automation systems to smoothly and steadily transfer wafer-carrying components into and out of high-temperature processing equipment (such as oxidation furnaces, diffusion furnaces, CVD furnaces, etc.). These silicon carbide components can effectively ensure the concentricity accuracy between the wafers and the furnace tubes, thus guaranteeing process uniformity and stability during critical processes such as diffusion, oxidation, and chemical vapor deposition.

The Performance of Semicorex Silicon Carbide Ceramic Cantilever Paddles

1. Low pollution performance:

Semicorex silicon carbide ceramic cantilever paddles, processed with high-precision treatment, reach dust-free and particle-free standards. Their matrices have impurity content strictly controlled below 300PPM, and the impurity content of CVD silicon carbide coating is even lower than 5PPM.

2. High temperature stability:

Due to the excellent high-temperature resistance and thermal shock resistance of silicon carbide, Semicorex silicon carbide ceramic cantilever paddles can prolonged maintain their structural stability at high temperatures up to 1250°C, without deforming, softening, or being damaged caused by high temperature.

3. Exceptional load capacity:

Semicorex silicon carbide ceramic cantilever paddles deliver exceptional load capacity benefiting from their unique structural design and their superior material properties (high mechanical strength and hardness). This exceptional load capacity enables them to withstand the weight of large batches of wafers to meeting the needs of mass production, which effectively improves the efficiency of wafer batch processing.

4. Remarkable corrosion resistance:

Semicorex silicon carbide ceramic cantilever paddles exhibit excellent corrosion resistance to oxygen, chlorine, and other corrosive substances present at high temperatures in semiconductor and photovoltaic manufacturing processes. This superior performance is crucial for ensuring the smooth operation of production processes by avoiding the losses and time caused by damage to the silicon carbide ceramic cantilever paddles.

The Packaging Method of Semicorex Silicon Carbide Ceramic Cantilever Paddles