Silicon Carbide Cassette Boats

Semicorex silicon carbide cassette boats are the indispensable carrying components, with their stable and high-strength structure, safely and precisely securely hold, transfer, and handle multiple semiconductor wafers. They are widely used in the various high-temperature semiconductor processes to ensure optimized heat and gas flow distribution for consistent processing results.

Carefully selected raw material

Precisely fabricated from semiconductor-grade silicon carbide powder through high-temperature sintering, Semicorex silicon carbide cassette boats possess the following excellent properties.

1.Ultra-high purity: The impurity content of the substrate is controlled to be below 100 PPM, and the impurity level of CVD silicon carbide coating can reach less than 1 PPM.

2.Reliable corrosion resistance: Silicon carbide ceramic deliver strong corrosion resistance, and it is resistant to corrosion from most acids (such as hydrochloric acid, sulfuric acid, and hydrofluoric acid), alkalis (such as caustic soda), solvents, and oxidizing media.

3.Exceptional thermal management capacity: With exceptional thermal resistance and a low thermal expansion coefficient, silicon carbide cassette boats can maintain their chemical properties and mechanical strength even when they are exposed to prolonged operating conditions at a high temperature around 1250 °C.

Precision-engineered Structure

1. Horizontal frame structure: The horizontal frame structure of Semicorex silicon carbide cassette boats makes them perfectly fit horizontal high-temperature furnace tubes.

2. Evenly spaced slot notches: Featuring numerous evenly spaced slot notches, Semicorex silicon carbide cassette boats can firmly hold the wafer in place, which can significantly prevent the unwanted scratches, abrasions, and damage resulting from wafer displacement, thus effectively ensuring semiconductor process stability and wafer yield.

3. Multi-slot design: Multiple slots designed to carry multiple wafers enables Semicorex silicon carbide cassette boats to improve their single-batch processing throughput and overall production efficiency.

4. Open architecture: Semicorex silicon carbide cassette boats are equipped with the thoughtful open architecture, which can help achieve uniform gas distribution and sufficient reaction contact, which thereby effectively minimizes inconsistent process results.