Silicon Carbide Cantilever Paddles

Semicorex silicon carbide cantilever paddles are typically used with horizontal wafer boats in the high-temperature processing furnaces. They can ensure precise, smooth transfer of wafer boats into and out of furnace tubes, providing a strong support for the stability and yield of semiconductor manufacturing. Specifically designed for high-temperature wafer treatment, Semicorex silicon carbide cantilever paddles perform steadily at around 1250°C under a harsh working atmosphere consisting of oxygen (reaction gas), nitrogen (protective gas) and a small amount of hydrogen chloride.

High-standard material selection

Premium products rely on fine raw materials. Semicorex adopts high-purity silicon carbide raw material to ensure our silicon carbide cantilever paddles are top-tier quality across the industry. Their bases are made of high-quality reaction bonded silicon carbide with impurity content controlled below 100 ppm and their surfaces are covered with a CVD SiC coating where impurities are kept under 1 ppm. This high-standard material making Semicorex silicon carbide cantilever paddles delivers excellent properties listed as below.

1. Ultra-high cleanliness: Semicorex silicon carbide cantilever paddles feature high purity and will not release unwanted impurities during operation, fundamentally eliminating contamination to wafers and processing furnaces.

2. Stable thermal stability: Semicorex silicon carbide cantilever paddles operate reliably at 1250°C and endure sharp temperature changes when entering and exiting the furnace, free from any deformation or cracking.

3. Superior mechanical strength: Semicorex silicon carbide cantilever paddles boast high hardness and strength and can endure wear and scratches during frequent pushing and pulling operations.

4. Dependable corrosion resistance: Semicorex silicon carbide cantilever paddles can withstand severe corrosion by strong alkalis and acids thanks to their remarkable chemical stability.

Considerate design and precision machining

Semicorex uses the integral 3D printing technology to form silicon carbide cantilever paddles, which allows them free from weak stress points at joints, delivering reliable load capacity during operation. It also supports full-dimensional customization of silicon carbide cantilever paddles. Cantilever paddles can be precisely tailored in length, structure and interface specification and are available to perfectly match furnace tube diameters, wafer boat dimensions, automated loading systems and specific process requirements.