SiC Wafer Boat
  • SiC Wafer BoatSiC Wafer Boat
  • SiC Wafer BoatSiC Wafer Boat
  • SiC Wafer BoatSiC Wafer Boat
  • SiC Wafer BoatSiC Wafer Boat
  • SiC Wafer BoatSiC Wafer Boat

SiC Wafer Boat

Semicorex provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. We have been manufacturer and supplier of silicon carbide coating film for many years. Our SiC Wafer Boat has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Introducing our high-quality SiC Wafer Boat, designed to provide a reliable solution for wafer processing in various industries. These ceramic pedestals are manufactured using high-purity ceramics, which offer excellent resistance to thermal shock, abrasion, and chemical corrosion, making them ideal for harsh wafer processing environments.
Our SiC Wafer Boats are also highly customizable, and we can work with you to create custom pedestals to meet your unique specifications. We take pride in our ability to deliver high-quality, reliable products that meet the demands of our customers. Our Ceramic Wafer Boats are made to last and offer a long service life, ensuring that you get the most value out of your investment.
Order now and experience the benefits of our high-quality SiC Wafer Boat in your wafer processing operations.


Parameters of SiC Wafer Boat

Technical Properties

Index

Unit

Value

Material Name

Reaction Sintered Silicon Carbide

Pressureless Sintered Silicon Carbide

Recrystallized Silicon Carbide

Composition

RBSiC

SSiC

R-SiC

Bulk Density

g/cm3

3

3.15 ± 0.03

2.60-2.70

Flexural Strength

MPa (kpsi)

338(49)

380(55)

80-90 (20°C) 90-100(1400°C)

Compressive Strength

MPa (kpsi)

1120(158)

3970(560)

> 600

Hardness

Knoop

2700

2800

/

Breaking Tenacity

MPa m1/2

4.5

4

/

Thermal Conductivity

W/m.k

95

120

23

Coefficient of Thermal Expansion

10-6.1/°C

5

4

4.7

Specific Heat

Joule/g 0k

0.8

0.67

/

Max temperature in air

1200

1500

1600

Elastic Modulus

Gpa

360

410

240


Features of SiC Wafer Boat

- CVD Silicon Carbide coatings to improve service life.
- Thermal insulation made of high-performance purified rigid carbon.
- Have a high thermal conductivity, and excellent heat distribution properties.
- High-purity ceramic and SiC coating for pinhole resistance and higher lifetime



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