SiC Ceramic Wafer Boats

Selecting reliable and durable wafer boats is crucial to ensure process stability and wafer yield during high-temperature and high-corrosion operating conditions. Semicorex SiC ceramic wafer boats are the ideal choice for these purpose by processing their multiple advantages including high integration, high stability, high temperature resistance, wear resistance, and long service life.

Premium raw material selections

Semicorex’s quality control over SiC ceramic wafer boats begins with their rigorous raw material selection. Semicorex SiC ceramic wafer boats are made of high-purity semiconductor-level silicon carbide powder via high-temperature sintering. Thanks to their premium raw material, they delivers the following exceptional performance.

1. Ultra-high purity, low metallic impurity contamination.

2. Dense material structure, lowering wafer contamination caused by particle shedding.

3. Excellent corrosion resistance against plasma, strong acids and alkalis.

4. High hardness and mechanical strength, wear and scratch resistant.

5. Outstanding thermal stability, no deformation or creep at 1250°C.

6. Excellent thermal shock resistance, reducing the thermal stress from rapid temperature changes.

Thoughtful customized design

Semicorex SiC ceramic wafer boats match well with many leading furnace OEMs in the industry, such as TEL, ASM, and Kokusai Electric. Semicorex offers custom-engineered solutions for our valued customers, supporting customization of wafer boat dimensions, slot pitch, slot depth, slot profile (V-shape or U-shape), and corresponding angles to enable perfect compatibility with your equipment and processing requirements.

Precision machining accuracy

Backed with advanced machining equipment and mature processing technologies, Semicorex are able to strict control the dimensions and tolerances of their SiC ceramic wafer boats. This high-precision dimensional control ensures semiconductor wafers are firmly positioned during operating, which effectively prevents wafer damage resulting from slippage or tilting. After precision machining, the evenly spaced slots of SiC ceramic wafer boats can ensure that each wafer is heated and reacted uniformly during oxidation, diffusion, and CVD processes, which greatly contributes to improving process consistency and semiconductor chip yield.