SIC ceramic cantilever paddles

Semicorex SIC ceramic cantilever paddles are crucial components for moving wafer carriers into and out of furnaces. They are widely used in thermal processing equipment such as oxidation, diffusion and LPCVD (Low-Pressure Chemical Vapor Deposition) furnaces in photovoltaic and semiconductor manufacturing.

Due to the excellent mechanical strength, thermal stability, high-temperature resistance, oxidation resistance, thermal shock resistance and chemical corrosion resistance of reaction-bonded silicon carbide (RBSIC), it is suitable for the manufacture of large-sized silicon carbide cantilever paddles.

Semicorex SIC ceramic cantilever paddles derive their high load-bearing capacity from the inherent mechanical strength and rigidity of high-quality reaction-bonded silicon carbide (RBSiC) material. Capable of sustaining the heavy load of silicon wafers, these paddles optimize throughput for individual diffusion cycles and aid in the improvement of production efficiency.

The superior material properties of reaction-bonded silicon carbide enable the SIC ceramic cantilever paddles to have excellent stability in high-temperature operating environments, ensuring the concentricity of the silicon wafer and the furnace tube, making processes such as diffusion and passivation more uniform. This stability effectively avoids deformation or damage to the silicon carbide cantilever paddle caused by high temperature and heavy load, reducing the risk of resulting silicon wafer damage or equipment failure.

Semicorex SiC ceramic cantilever paddles employ the single-piece 3D printing process, which is instrumental in maintaining the dimensional accuracy and shape consistency of components. This design of SiC ceramic cantilever paddles also ensures seamless compatibility with diffusion furnace systems. Their robust cantilever structure enables smooth, vibration-free transfers, minimizing the chance of wafer breakage or deviation when loading and unloading.

Quality is a top priority for Semicorex. All finished silicon carbide cantilever paddles are required to undergo multiple testing procedures, including dimensional accuracy checks, material property evaluations, to guarantee its superior quality. If you have any purchasing needs, please do not hesitate to contact us.