Semicorex 8-Inch SiC Wafer Chucks

Semicorex 8-inch SiC wafer chucks are the high-performance SiC ceramic wafer fixtures engineered specifically for high-end wafer fabrication in semiconductor field. Combining superior material performance and precision machining technologies, Semicorex 8-inch SiC wafer chucks are suitable for the demanding operating conditions requiring excellent thermal stability, mechanical strength and corrosion resistance.

Send Inquiry

Product Description

During the state-of-the-art chip production, wafer chucks are required to have ultra-high cleanliness, consistent operational performance and dependable adsorption stability. Semicorex 8-inch SiC wafer chucks are the ideal solutions to meet these requirements. They are able to avoid wafer scratches, contamination and displacement in high-precision processing, which in turn improves wafer fabrication efficiency and yield rates.

Premium material properties

Precisely manufactured from high-quality silicon carbide materials via isostatic forming and specialized high-temperature sintering, Semicorex 8-inch SiC wafer chucks deliver the exceptional material properties detailed as below:

1. High rigidity and strength to maintain robust structure integrity.

2. Excellent thermal stability, free from thermal creep deformation.

3. Exceptional thermal conductivity to achieve rapid uniform heat conduction.

4. Stable chemical inert to withstand hash corrosion working conditions.

5. Ultra-high cleanliness, low metallic impurities and low particulate contaminants.

Precision manufacturing capability

Supporting by our well-experienced technical team and integrated productionlines, Semicorex 8-inch SiC wafer chucks deliver the following outstanding technological advantages to ensure consistent wafer contact and precise wafer processing:

1. Tight dimensional tolerances

2. High-precision parallelism

3. Stringent roughness control

4. Suitable mounting features

5. High-efficient lead time

Thoughtful customer services

Semicorex is always putting customer needs as priority. In order to better service our customers, Semicorex offers the following comprehension supports:

1. Providing rapid response to customer inquiries.

2. Providing professional support to address customers’ technical questions.

3. Providing custom manufacturing of our wafer chuck carefully based on customers’ drawings.

4. Capable of small trial runs and full-scale mass production.

5. Providing comprehensive and reliable after-sales support.