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Durable Focus Rings for Semiconductor Processing

Durable Focus Rings for Semiconductor Processing

Semicorex durable focus rings for semiconductor processing are designed to withstand the extreme environments of plasma etch chambers used in semiconductor processing. Our focus rings are made of high-purity graphite coated with a dense, wear-resistant silicon carbide (SiC) coating. The SiC coating has high corrosion and heat resistance properties, as well as excellent thermal conductivity. We apply SiC in thin layers onto the graphite using the chemical vapor deposition (CVD) process to improve the service life of our focus rings.

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Do you want buy advanced and durable Chemical-Mechanical-Polishing-Edge-Ring? Semicorex is definitely your good choice. We are known as one of the most competitive Chemical-Mechanical-Polishing-Edge-Ring manufacturers and suppliers in China. We also provide bulk packing. You may need some customized services to meet the actual needs of your region, you can leave us a message through the contact information on the webpage. We sincerely welcome new and old customers to visit our factory for consultation and negotiation.
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