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RTP SiC Coating Carrier

RTP SiC Coating Carrier

Semicorex RTP SiC Coating Carrier offers superior heat resistance and thermal uniformity, making it the perfect solution for semiconductor wafer processing applications. With its high-quality SiC coated graphite, this product is designed to withstand the harshest deposition environment for epitaxial growth. The high thermal conductivity and excellent heat distribution properties ensure reliable performance for RTA, RTP, or harsh chemical cleaning.

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Product Description

Our RTP SiC Coating Carrier is engineered to withstand the toughest conditions of the deposition environment. With its high heat and corrosion resistance, the epitaxy susceptors are subjected to the perfect deposition environment for epitaxial growth. The fine SiC crystal coating on the carrier ensures a smooth surface and high durability against chemical cleaning, while the material is engineered to prevent cracks and delamination.
At Semicorex, we focus on providing high-quality, cost-effective RTP SiC coating carrier, we prioritize customer satisfaction and provide cost-effective solutions. We look forward to becoming your long-term partner, delivering high-quality products and exceptional customer service.
Contact us today to learn more about our RTP SiC Coating Carrier.

Parameters of RTP SiC Coating Carrier

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of RTP SiC Coating Carrier

High purity SiC coated graphite
Superior heat resistance & thermal uniformity
Fine SiC crystal coated for a smooth surface
High durability against chemical cleaning
Material is designed so that cracks and delamination do not occur.

Hot Tags: RTP SiC Coating Carrier, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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