RTP Graphite Carrier Plate

Semicorex's RTP Graphite Carrier Plate is the perfect solution for semiconductor wafer processing applications, including epitaxial growth and wafer handling processing. Our product is designed to offer superior heat resistance and thermal uniformity, ensuring that the epitaxy susceptors are subjected to the deposition environment, with high heat and corrosion resistance.

Send Inquiry

Product Description

Our product features high-purity SiC-coated graphite, which offers excellent heat distribution properties, ensuring that the SiC-coated carrier has a smooth surface, free from cracks and delamination. Our RTP Graphite Carrier Plate is finely silicon carbide coated, ensuring that the surface is smooth and free from any defects. This product is highly durable against harsh chemical cleaning and is designed to ensure that cracks and delamination do not occur.
We offer a price advantage that our competitors cannot match, and we are committed to becoming your long-term partner in China.
With our RTP graphite carrier plate, you can be assured of excellent performance, superior heat resistance, and thermal uniformity. The SiC-coated carrier is designed to withstand high temperatures and is highly resistant to chemical cleaning, ensuring that it lasts for many years. Our product is also designed to be easy to use, making it ideal for both new and experienced users.
At Semicorex, we are committed to providing high-quality products and services to our customers. We use only the best materials, and our products are designed to meet the highest standards of quality and performance. Our RTP Graphite Carrier Plate is no exception. Contact us today to learn more about how we can help you with your semiconductor wafer processing needs.

Parameters of RTP Graphite Carrier Plate

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of RTP Graphite Carrier Plate

High purity SiC coated graphite
Superior heat resistance & thermal uniformity
Fine SiC crystal coated for a smooth surface
High durability against chemical cleaning
Material is designed so that cracks and delamination do not occur.