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SiC-coated planetary susceptors

Semicorex SiC-coated planetary susceptors are the high-precision graphite supporting components covered with a dense silicon carbide coating, specially engineered for the advanced MOCVD equipment. They can enable uniform gas flow and thermal distribution, thus contributing to creating an optimal epitaxial environment.

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Quartz Susceptor Support

Semicorex Quartz Susceptor Support is designed specifically for semiconductor epitaxial furnaces. Its high-purity materials and precise structure enable accurate lifting and positioning control of trays or sample holders within the reaction chamber. Semicorex can provide customized high-purity quartz solutions, ensuring long-term performance stability of every support component in the high-vacuum, high-temperature, and highly corrosive semiconductor process environments through advanced processing technology and stringent quality control.*

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1x2" Graphite Wafer Susceptors

Semicorex 1x2" graphite wafer susceptors are the high-performing carrying components specially engineered for 2-inch wafers, which are well-suited for the epitaxial process of semiconductor wafers. Choose Semicorex for industry-leading material purity, precision engineering, and unmatched reliability in demanding epitaxial growth environments.

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TaC-Coated Graphite Wafer Susceptors

Semicorex TaC-coated graphite wafer susceptors are the cutting-edge components ypically applied to stably support and position the semiconductor wafers during the advanced semiconductor epitaxial processes. Leveraging state-of-the-art production technologies and mature manufacturing experience, Semicorex is committed to supplying the custom-engineered TaC-coated graphite wafer susceptors with market-leading quality for our valued customers.

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CVD TaC Coated Susceptors

Semicorex CVD TaC Coated Susceptors are high-performance graphite susceptors with a dense TaC coating, designed to deliver excellent thermal uniformity and corrosion resistance for demanding SiC epitaxial growth processes. Semicorex combines advanced CVD coating technology with strict quality control to provide long-lasting, low-contamination susceptors trusted by global SiC epi manufacturers.*

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SiC Epi-Wafer Susceptors

Semicorex SiC epi-wafer susceptors made from SiC-coated graphite are engineered to provide exceptional thermal uniformity and chemical stability in high-temperature epitaxial growth processes. Semicorex is committed to delivering the highest-quality products and the best service to customers worldwide. With strong technical expertise and reliable manufacturing capabilities, we help global partners achieve stable performance and long-term value.*

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