SiC-coated planetary susceptors

Semicorex SiC-coated planetary susceptors are indispensable supporting component designed for semiconductor epitaxial growth in Aixtron G2 equipment, in which they are able to securely support wafers and rotate in a planetary motion way. In this way, the precise thermal uniformity and uniform gas distribution across the wafer surface can be successfully achieved, which results in premium-quality epitaxial layer deposition on wafers.

Advantages of Semicorex SiC-coated planetary susceptors

1. Multi-wafer pocket design

Semicorex SiC-coated planetary susceptors feature a uniform distribution of several wafer pockets with precisely controlled dimensions. These wafer pockets are able to firmly hold the wafer substrates during the epitaxial growth process, which can effectively minimize epitaxial process variations caused by the unwanted movement of wafer substrates. In addition, this multi-wafer pocket design allows multiple wafer substrates to undergo epitaxial deposition simultaneously in a single process run, greatly improving the overall efficiency of the epitaxial growth process.

2. Optimized Gas Flow Hole Arrangement

Semicorex incorporates a carefully engineered set of gas flow channels into its SiC-caoted planetary susceptors, which refines optimization of gas flow dynamics and thermal uniformity across the wafer surface throughout the epitaxial process. This thoughtful design enables accurate control over gas flow rate and distribution inside the reaction chamber, which is essential for achieving high-quality thin films, uniform layer thickness, and reliable overall device performance.

3. Ultra-high cleanliness

Semicorex SiC-coated planetary susceptors are manufactured with ultra-high-purity materials and extremely low impurity levels, fully meeting the strict cleanliness requirements of semiconductor fabrication. They effectively minimize wafer contamination caused by metallic outgassing, even under the high-temperature and corrosive conditions typical of epitaxial processes.

4. Long-lasting service life

Semicorex's quality control begins with our rigorous selection of raw materials. SiC-coated planetary susceptors are precision-manufactured from semiconductor-grade graphite and silicon carbide, offering excellent high-temperature resistance and corrosion resistance, making them perfectly withstand the challenging high-temperature, highly corrosive epitaxial operating conditions. With these excellent material properties, Semicorex SiC-coated planetary susceptors can maintain their consistent performance and structural integrity and avoid their surface damage and performance decline in high-temperature and high-corrosion reaction chambers, which thereby greatly extending SiC-coated planetary susceptors' service life.