Products

Semicorex three-piece graphite crucibles are the high-performance split graphite containers specially engineered for single-crystal silicon growth processes. Ideal for high-end semiconductor thermal treatment, Semicorex three-piece graphite crucible can reliably support the quartz crucible and its internal materials to achieve the controlled growth of single-crystal structures.

Semicorex silicon carbide furnace tubes are the high-performance SiC components specially engineered for high-temperature front-end processes in the advanced semiconductor industry. Thanks to their exceptional performance, Semicorex silicon carbide furnace tubes can withstand the harsh operating environments with extreme temperatures, corrosive gases and drastic thermal fluctuations.

Semicorex CVD SiC-coated wafer boats are the high-precision ceramic carrying tools made of ultra-high-purity silicon carbide, featuring high reliability, excellent cleanliness and extended service life. Serving as the ideal solution for wafer thermal processing, Semicorex CVD SiC-coated wafer boats can achieve secure and stable positioning of wafers during transfer and processing stages.

Semicorex Upper Electrode Grounding Ring is an ultra-high-purity CVD SiC plasma control component that stabilizes electrical potential and supports uniform plasma distribution in advanced semiconductor etching and deposition systems. Semicorex supplies precision CVD SiC grounding rings and plasma-facing semiconductor components worldwide, offering customized dimensions, electrical properties, and reliable global delivery for leading semiconductor equipment manufacturers.*

Semicorex Etching Edge Ring is a high-purity CVD SiC plasma-facing component that controls plasma distribution around the wafer edge, improving etch uniformity, process accuracy, and overall semiconductor manufacturing performance. Semicorex provides advanced CVD SiC focus rings, grounding rings, showerheads, and customized plasma control components to semiconductor manufacturers worldwide, supported by precision engineering and reliable global supply.*

Semicorex quartz wafer cleaning tanks, precisely made of high-purity quartz materials, are the indispensable components specifically engineered for wafer wet cleaning in high-end semiconductor manufacturing. As the industry-leading company in China, Semicorex strives to provide customers with stable-performing and cost-effective quartz solutions.