Semicorex three-piece graphite crucibles are the high-performance split graphite containers specially engineered for single-crystal silicon growth processes. Ideal for high-end semiconductor thermal treatment, Semicorex three-piece graphite crucible can reliably support the quartz crucible and its internal materials to achieve the controlled growth of single-crystal structures.
The graphite crucible is commonly placed on the sing crystal furnace's central support platform and positioned between the graphite heater and quartz crucible in single-crystal silicon growth process. They can steadily support the quartz crucible and molten silicon materials and consistently conduct heat to the quartz crucible for heating and melting polysilicon during this process.
Semicorex uses the high-purity graphite material to manufacture our three-piece graphite crucibles, this high-standard raw material selection endows crucibles with excellent overall performance listed as follows.
A. Ultra-high cleanliness
Impurity contamination is a critical hazard that impairs the lattice structure of silicon crystals during manufacturing. The usage of semiconductor-grade high-purity graphite materials can minimize contamination risks caused by impurity precipitation from three-piece graphite crucibles in single-crystal silicon growth.
B. Superior thermal management capability
Semicorex three-piece graphite crucibles' thermal resistance enables stable performance at high temperatures, providing solid support for single-crystal silicon growth. With their remarkable thermal conductivity, Semicorex three-piece graphite crucibles can achieve efficient and consistent polysilicon melting.
C. Reliable chemical stability
Featuring stable chemical properties, Semicorex three-piece graphite crucibles can effectively resist corrosion during single crystal growth and prevent unwanted contamination resulting from reaction byproducts. Semicorex also offers TaC and SiC coating options for our customers, making crucibles suitable for high-corrosive operating conditions.
Semicorex three-piece graphite crucibles are constructed in three segment and connect with dedicated parts. This design delivers prominent strengths over conventional one-piece graphite crucibles:
A. The three-petal split structure of crucibles solves the inconvenience of material handling of conventional one-piece graphite crucibles, significantly saving the operating time.
B. Three-piece graphite crucibles support single-piece replacement, which effectively lowers maintenance and replacement costs for users.
C. The three-petal split structure of crucibles can release thermal stress induced by temperature fluctuations to avoid the structural impairment, thus greatly reducing the cracking risks.