CVD SiC-Coated Wafer Boats

In high-precision wafer processing, CVD SiC-coated wafer boats carrying batches of wafers go through a series of thermal treatment processes, such as diffusion, oxidation, annealing and chemical vapor deposition. They can evenly and stably hold wafers during these processes and enable the process gases to react uniformly with wafers, thus ensuring the consistency and stability of the processing results.

1. Premium raw material selection

Semicorex produces CVD SiC-coated wafer boats using semiconductor-grade silicon carbide and applies an ultra-high-purity CVD SiC coating on their surface, which enables wafer boats to excel exceptionally well under rigorous semiconductor processing procedures:

A. Ultra-high purity

The impurity content of wafer boats' base material is less than 100 ppm and that of the CVD SiC coating is even less than 1ppm.

B. Superior thermal resistance

Semicorex CVD SiC-coated wafer boats can operate steadily in 1250 ℃ high temperatures without any deformation, creep, or fracture.

C. Reliable corrosion resistance

With great chemical stability, Semicorex CVD SiC-coated wafer boats can perform steadily for a long time under oxidizing and reducing gas atmospheres.

D. Excellent mechanical strength

Semicorex CVD SiC-coated wafer boats can effectively prevent abrasion and scratching during frequent pull-in and pull-out operations because of their stable mechanical strength.

2. Well-established production capacity

Specializing in precision ceramic solutions for semiconductor applications, Semicorex is equipped with an experienced technical team and advanced processing equipment. Semicorex’s remarkable production capacity is detailed as follows:

A. Flexible customization service

Semicorex CVD SiC-coated wafer boats are formed via 3D printing technology and can be customized in their structure, dimension, slot spacing, slot depth, slot shape and other requirements.

B. Precision dimension control

Semicorex maintains tight control over the dimension accuracy of CVD SiC-coated wafer boats benefiting from its top-tier machining technologies and equipment, which guarantees perfect wafer contact and steady handling during operation.

C. High production efficiency

Another outstanding production capacity of Semicorex is our short production cycle. For the small-sized wafer boats, their lead time is appropriately 35 days, which significantly shortens customers’ waiting period.