Batch Wafer Boat
  • Batch Wafer BoatBatch Wafer Boat
  • Batch Wafer BoatBatch Wafer Boat
  • Batch Wafer BoatBatch Wafer Boat
  • Batch Wafer BoatBatch Wafer Boat
  • Batch Wafer BoatBatch Wafer Boat

Batch Wafer Boat

Semicorex provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. We have been manufacturer and supplier of silicon carbide coating film for many years. Our Batch Wafer Boat has a good price advantage and cover most of the European and American markets. We look forward to becoming your long-term partner in China.

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Product Description

Semicorex Batch Wafer Boat are made from high-quality silicon carbide ceramic material for superior chemical resistance and thermal stability.
Our Batch Wafer Boat has a smooth surface finish and provide excellent wafer support and protection during processing. The SiC coating ensures uniformity and stability during processing, protecting the wafers from contamination and damage. With excellent thermal conductivity and superior mechanical strength, our wafer holders provide consistent and reliable results.
Our team of experts is committed to providing the best quality and service. We offer custom designs to meet your specific requirements, and our batch wafer boats are backed by our quality assurance program.


Parameters of Batch Wafer Boat

Technical Properties

Index

Unit

Value

Material Name

Reaction Sintered Silicon Carbide

Pressureless Sintered Silicon Carbide

Recrystallized Silicon Carbide

Composition

RBSiC

SSiC

R-SiC

Bulk Density

g/cm3

3

3.15 ± 0.03

2.60-2.70

Flexural Strength

MPa (kpsi)

338(49)

380(55)

80-90 (20°C) 90-100(1400°C)

Compressive Strength

MPa (kpsi)

1120(158)

3970(560)

> 600

Hardness

Knoop

2700

2800

/

Breaking Tenacity

MPa m1/2

4.5

4

/

Thermal Conductivity

W/m.k

95

120

23

Coefficient of Thermal Expansion

10-6.1/°C

5

4

4.7

Specific Heat

Joule/g 0k

0.8

0.67

/

Max temperature in air

1200

1500

1600

Elastic Modulus

Gpa

360

410

240


The difference between SSiC and RBSiC:

1. Sintering process is different. RBSiC is to infiltrate free Si into silicon carbide at a low temperature, SSiC is formed by natural shrinkage at 2100 degrees.

2. SSiC have smoother surface, higher density and higher strength, for some sealings with more strict surface requirements, SSiC will be better.

3. Different used time under different PH and temperature, SSiC is longer than RBSiC


Features of Batch Wafer Boat

- High strength (Mohs hardness 9.5, second only to diamond)
- Corrosion resistance to acids, alkalis, salts and organic solvents
- High thermal conductivity, plasma resistance, long life
- Semiconductors



Hot Tags: Batch Wafer Boat, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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