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Vertical Wafer Boat
  • Vertical Wafer BoatVertical Wafer Boat

Vertical Wafer Boat

Semicorex Vertical Wafer Boat represents a crucial component within semiconductor processing, designed to securely house and transport delicate silicon wafers throughout various stages of fabrication. Crafted from Silicon Carbide (SiC), a robust and thermally stable material renowned for its exceptional properties in harsh environments, these boats ensure the integrity and safety of wafers during processing. Semicorex is committed to providing quality products at competitive prices, we look forward to becoming your long-term partner in China.

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Product Description

The Semicorex Vertical Wafer Boat is a specially designed carrier for multiple wafers that maximizes space efficiency within processing chambers. These Vertical Wafer Boat are typically rectangular or cylindrical in shape, and each boat has precision-machined slots or pockets that are spaced to securely hold individual wafers in an upright position. The Vertical Wafer Boat are constructed from Silicon Carbide (SiC) which provides excellent resistance to high temperatures, corrosive chemicals, and mechanical stress, making them ideal for safeguarding wafers from potential damage.

During semiconductor fabrication, wafers undergo numerous intricate processes, including diffusion, RTP, and thermal fields. The Vertical Wafer Boat plays a vital role in facilitating these processes by serving as a carrier for wafers, allowing seamless transfer between different equipment and stages. Its vertical orientation minimizes the footprint within processing chambers, optimizing throughput, and enabling efficient handling of large batches of wafers.

The Semicorex Vertical Wafer Boat is a cornerstone of semiconductor processing, providing a robust and dependable solution for the safe handling and transport of wafers throughout various stages of fabrication. Its advanced design, coupled with the exceptional properties of SiC, underscores its pivotal role in the production of cutting-edge semiconductor devices.

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