Semiconductor Wafer Carrier for MOCVD Equipment

You can rest assured to buy Semiconductor Wafer Carrier for MOCVD Equipment from our factory. Semiconductor wafer carriers are an essential component of MOCVD equipment. They are used to transport and protect semiconductor wafers during the manufacturing process. Semiconductor Wafer Carriers for MOCVD Equipment are made of high-purity materials and are designed to maintain the integrity of the wafers during processing.

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Product Description

our Semiconductor Wafer Carrier for MOCVD Equipment is an essential component of the semiconductor manufacturing process. It is made of high-purity graphite with silicon carbide coating by CVD method and is designed to accommodate multiple wafers. The carrier offers several benefits, including improved yield, enhanced productivity, reduced contamination, increased safety, and cost-effectiveness. If you're looking for a reliable and high-quality Semiconductor Wafer Carrier for MOCVD Equipment, our product is the perfect solution.
Contact us today to learn more about our Semiconductor Wafer Carrier for MOCVD Equipment.

Parameters of Semiconductor Wafer Carrier for MOCVD Equipment

Main Specifications of CVD-SIC Coating
SiC-CVD Properties
Crystal Structure	FCC β phase
Density	g/cm ³	3.21
Hardness	Vickers hardness	2500
Grain Size	μm	2~10
Chemical Purity	%	99.99995
Heat Capacity	J·kg-1 ·K-1	640
Sublimation Temperature	℃	2700
Felexural Strength	MPa (RT 4-point)	415
Young’ s Modulus	Gpa (4pt bend, 1300℃)	430
Thermal Expansion (C.T.E)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300

Features of SiC Coated Graphite Susceptor for MOCVD

- Avoid peeling off and ensure coating on all surface
High temperature oxidation resistance: Stable at high temperatures up to 1600°C
High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.
Corrosion resistance: high hardness, dense surface and fine particles.
Corrosion resistance: acid, alkali, salt and organic reagents.
- Achieve the best laminar gas flow pattern
- Guarantee evenness of thermal profile
- Prevent any contamination or impurities diffusion