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SiC Coated Graphite Susceptor for MOCVD
  • SiC Coated Graphite Susceptor for MOCVDSiC Coated Graphite Susceptor for MOCVD
  • SiC Coated Graphite Susceptor for MOCVDSiC Coated Graphite Susceptor for MOCVD

SiC Coated Graphite Susceptor for MOCVD

Semicorex is a large-scale manufacturer and supplier of Silicon Carbide Coated Graphite Susceptor in China. We focus on semiconductor industries such as silicon carbide layers and epitaxy semiconductor. Our SiC Coated Graphite Susceptor for MOCVD has a good price advantage and cover many of the European and American markets. We look forward to becoming your long-term partner.

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Product Description

Semicorex SiC Coated Graphite Susceptor for MOCVD is a high purity Silicon Carbide coated graphite carrier, using in the process to grow the epixial layer on the wafer chip. It is the center plate in MOCVD, the shape of gear or ring. SiC Coated Graphite Susceptor for MOCVD has high heat and corrosion resistance, which has great stability in extreme environment.
At Semicorex, we are committed to providing high-quality products and services to our customers. We use only the best materials, and our products are designed to meet the highest standards of quality and performance. Our SiC Coated Graphite Susceptor for MOCVD is no exception. Contact us today to learn more about how we can help you with your semiconductor wafer processing needs.


Parameters of SiC Coated Graphite Susceptor for MOCVD

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase

Density

g/cm ³

3.21

Hardness

Vickers hardness

2500

Grain Size

μm

2~10

Chemical Purity

%

99.99995

Heat Capacity

J·kg-1 ·K-1

640

Sublimation Temperature

2700

Felexural Strength

MPa (RT 4-point)

415

Young’ s Modulus

Gpa (4pt bend, 1300℃)

430

Thermal Expansion (C.T.E)

10-6K-1

4.5

Thermal conductivity

(W/mK)

300


Features of SiC Coated Graphite Susceptor for MOCVD

- Avoid peeling off and ensure coating on all surface
High temperature oxidation resistance: Stable at high temperatures up to 1600°C
High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.
Corrosion resistance: high hardness, dense surface and fine particles.
Corrosion resistance: acid, alkali, salt and organic reagents.
- Achieve the best laminar gas flow pattern
- Guarantee evenness of thermal profile
- Prevent any contamination or impurities diffusion




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