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RTP/RTA SiC Coating Carrier

RTP/RTA SiC Coating Carrier

Semicorex RTP/RTA SiC Coating Carrier is engineered to withstand the toughest conditions of the deposition environment. With its high heat and corrosion resistance, this product is designed to provide optimal performance for epitaxial growth. The SiC coated carrier has a high thermal conductivity and excellent heat distribution properties, ensuring reliable performance for RTA, RTP, or harsh chemical cleaning.

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Product Description

Our RTP/RTA SiC Coating Carrier for MOCVD Epitaxial Growth is the perfect solution for wafer handling and epitaxial growth processing. With a smooth surface and high durability against chemical cleaning, this product offers reliable performance in harsh deposition environments.
The material of our RTP/RTA SiC coating carrier is engineered to prevent cracks and delamination, while the superior heat resistance and thermal uniformity ensure consistent performance for RTA, RTP, or harsh chemical cleaning.
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Parameters of RTP/RTA SiC Coating Carrier

Main Specifications of CVD-SIC Coating

SiC-CVD Properties

Crystal Structure

FCC β phase


g/cm ³



Vickers hardness


Grain Size



Chemical Purity



Heat Capacity

J·kg-1 ·K-1


Sublimation Temperature


Felexural Strength

MPa (RT 4-point)


Young’ s Modulus

Gpa (4pt bend, 1300℃)


Thermal Expansion (C.T.E)



Thermal conductivity



Features of RTP/RTA SiC Coating Carrier

High purity SiC coated graphite
Superior heat resistance & thermal uniformity
Fine SiC crystal coated for a smooth surface
High durability against chemical cleaning
Material is designed so that cracks and delamination do not occur.

Hot Tags: RTP/RTA SiC Coating Carrier, China, Manufacturers, Suppliers, Factory, Customized, Bulk, Advanced, Durable

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