Products

Semicorex silicon carbide furnace tubes are the high-performance SiC components specially engineered for high-temperature front-end processes in the advanced semiconductor industry. Thanks to their exceptional performance, Semicorex silicon carbide furnace tubes can withstand the harsh operating environments with extreme temperatures, corrosive gases and drastic thermal fluctuations.

Semicorex SiC Horizontal Furnace Tube is an advanced high-temperature process components designed for semiconductor diffusion, oxidation, annealing, and thermal treatment systems. Semicorex supplies high-performance SiC Horizontal Furnace Tubes to customers worldwide, delivering reliable semiconductor-grade ceramic solutions for high-temperature process equipment and advanced wafer manufacturing applications.*

Semicorex furnace tubes for LPCVD are the precision-manufactured tubular components with uniform and dense CVD SiC coating. Specially-designed for the advanced low pressure chemical vapor deposition process, Semicorex furnace tubes for LPCVD are able to provide suitable high-temperature, low-pressure reaction environments to improve the quality and yield of wafer thin-film deposition.

Semicorex CVD SiC-coated furnace tubes are the high-end tubular components specifically manufactured for the high-temperature semiconductor processing,such as oxidation, diffusion, and annealing of semiconductor wafers. Leveraging advanced processing technologies and mature manufacturing experience, Semicorex is committed to supplying the precision-machined CVD SiC-coated furnace tubes with market-leading quality for our valued customers.

Semicorex fused quartz furnace tubes are the crucial tubular quartz components that extensively deployed in cutting-edge semiconductor and photovoltaic manufacturing field. Meticulously crafted from high-purity quartz materials, Semicorex fused quartz furnace tubes are well-suited to the high-temperature, high-pressure, and strong corrosion working conditions.

SIC horizontal furnace tubes are the horizontally placed tubular reaction and heating containers that provides the stable high-temperature processing environments for semiconductor materials. With their unparalleled material properties, precision design, and enduring service life, Semicorex's SIC horizontal furnace tubes are the optimal solutions for improving yield and product quality.