Fused Quartz Furnace Tubes

Fused quartz furnace tubes typically form the high-temperature processing area for wafers together with the essential components such as quartz boats, reactors, heaters, and quartz baffles. During manufacturing, wafers are placed in quartz boats and conveyed into the furnace tubes for processes,such as diffusion, oxidation, and annealing. As the crucial part in these processes, fused quartz furnace tubes directly impact the quality and yield of semiconductor or photovoltaic products.

Relying on their reliable performance and quality, Semicorex fused quartz furnace tubes can withstand the operating environment of these processes over extended periods. Using Semicorex fused quartz furnace tubes can greatly reduce the risk of finished product damage caused by severe deformation or collapse of quartz furnace tubes after prolonged cyclic use.

The advantages of Semicorex fused quartz furnace tubes

1. Superb high-temperature resistance

Quartz glass has a softening point of approximately 1730°C. Semicorex fused quartz furnace tubes support long-term operation at 1100°C-1200°C with short-term tolerance for even higher temperatures.

2. Remarkable thermal stability

Semiconductor-grade quartz material deliver an extremely low coefficient of thermal expansion, which allows them to be rapidly cooled from high temperatures to room temperature without any cracking or damage.

3. Strong chemical corrosion resistance

Semicorex fused quartz furnace tubes feature strong chemical corrosion resistance. Except for hydrofluoric acid and hot phosphoric acid, they hardly react with other chemicals like acids, alkalis, salts.

4. Outstanding light transmittance

Exhibiting excellent transmittance across the ultraviolet to infrared spectrum, high-purity quartz achieves over 93% light transmittance in the visible range. This outstanding optical performance makes Semicorex fused quartz furnace tubes the suitable option for processes requiring optical monitoring or ultraviolet treatment.

The applications of Semicorex fused quartz furnace tubes

1. Used in the diffusion, oxidation, and annealing processes in semiconductor manufacturing

2. Used in the high-temperature reaction vessel in photovoltaic industry manufacturing

3. Used in the manufacture of spectrometer windows, laser sleeves, ultraviolet optical systems, and other optical applications.